Special issues and sections;
Meetings;
Semiconductor device manufacture;
D O I:
10.1109/TSM.2023.3323254
中图分类号:
T [工业技术];
学科分类号:
08 ;
摘要:
Since its beginning in 1992 in Japan, International Symposium on Semiconductor Manufacturing (ISSM) has provided unique opportunities to share the best practices of semiconductor manufacturing technologies for professionals. At the symposiums, semiconductor manufacturing professionals discussed the technologies developed to meet the worldwide requirements for advanced manufacturing. It is becoming crucial to re-examine semiconductor manufacturing in terms of fundamental principles to improve the performance of semiconductor devices. Moreover, utilizing artificial intelligence and machine learning technologies to improve semiconductor manufacturing have become a new challenge. These manufacturing technology challenges are showing the need for drastic revolutionary concept and stronger collaborative efforts to find solutions to the precompetitive challenges.
机构:
Hitachi Ltd, Div Informat Technol, Chiyoda Ku, Tokyo 1018010, JapanHitachi Ltd, Div Informat Technol, Chiyoda Ku, Tokyo 1018010, Japan
Otsuka, Nobuhiro
Uchino, Toshiyuki
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h-index: 0
机构:
Renesas Technology Corp, Strateg Prod Planning Div, Chiyoda Ku, Tokyo 1000004, JapanHitachi Ltd, Div Informat Technol, Chiyoda Ku, Tokyo 1018010, Japan
机构:
Imperial Coll London, Dept Metab Digest & Reprod, London SW7 2AZ, EnglandImperial Coll London, Dept Metab Digest & Reprod, London SW7 2AZ, England
Lo, Benny P. L.
Au, Kwok Wai Samuel
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Univ Hong Kong, Dept Mech & Automat Engn, Dept Surg, Hong Kong, Peoples R ChinaImperial Coll London, Dept Metab Digest & Reprod, London SW7 2AZ, England
Au, Kwok Wai Samuel
Chiu, Philip Wai Yan
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Univ Hong Kong, Dept Surg, Hong Kong, Peoples R ChinaImperial Coll London, Dept Metab Digest & Reprod, London SW7 2AZ, England
Chiu, Philip Wai Yan
IEEE TRANSACTIONS ON MEDICAL ROBOTICS AND BIONICS,
2024,
6
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: 2
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