Thermal stability of MoNbTaTiW, MoNbTaVW and CrMoNbTaW thin films deposited by high power impulse magnetron sputtering

被引：8

作者：

Gruber, Georg C. ^{[1
]}

Lassnig, Alice ^{[2
]}

Zak, Stanislav ^{[2
]}

Gammer, Christoph ^{[2
]}

Cordill, Megan J. ^{[1
,2
]}

Franz, Robert ^{[1
]}

机构：

[1] Univ Leoben, Dept Mat Sci, A-8700 Leoben, Austria

[2] Austrian Acad Sci, Erich Schmid Inst Mat Sci, A-8700 Leoben, Austria

来源：

SURFACE & COATINGS TECHNOLOGY | 2023年 / 454卷

基金：

奥地利科学基金会;

关键词：

High entropy alloy; Refractory metal; MoNbTaW based; Thin film; High power impulse magnetron sputtering; Thermal stability; MECHANICAL-PROPERTIES;

D O I：

10.1016/j.surfcoat.2022.129189

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

With the envisioned use as high-temperature materials, the thermal stability of three high entropy alloy thin films, based on the system MoNbTaW with additional Cr, Ti or V, was studied. All films were deposited by high power impulse magnetron sputtering and subsequently annealed in vacuum up to a temperature of 1200 degrees C and analyzed by X-ray diffraction. The obtained body-centered cubic structure in the as-deposited state remained stable up to the maximum annealing temperature. Measurements of the residual stress by wafer curvature and sin2 psi method revealed a general reduction of the stress with annealing temperature due to defect annihilation.

引用

页数：7

共 30 条

[1] [Anonymous], 2019, VAPOR PRESSURE CALCU
[2] Weak enthalpy-interaction-element-modulated NbMoTaW high-entropy alloy thin films
Bi, Linxia
Li, Xiaona
Hu, Yinglin
Zhang, Junyi
Wang, Xiao
Cai, Xuecheng
Shen, Tongde
Liu, Renwei
Wang, Qing
Dong, Chuang
Liaw, Peter K.
[J]. APPLIED SURFACE SCIENCE, 2021, 565
[3] Microstructural development in equiatomic multicomponent alloys
Cantor, B
Chang, ITH
Knight, P
Vincent, AJB
[J]. MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 2004, 375 : 213 - 218
[4] Structural and Thermodynamic Factors of Suppressed Interdiffusion Kinetics in Multi-component High-entropy Materials
Chang, Shou-Yi
Li, Chen-En
Huang, Yi-Chung
Hsu, Hsun-Feng
Yeh, Jien-Wei
Lin, Su-Jien
[J]. SCIENTIFIC REPORTS, 2014, 4
[5] Nanostructured nitride films of multi-element high-entropy alloys by reactive DC sputtering
Chen, TK
Wong, MS
Shun, TT
Yeh, JW
[J]. SURFACE & COATINGS TECHNOLOGY, 2005, 200 (5-6) : 1361 - 1365
[6] The origin of stresses in magnetron-sputtered thin films with zone T structures
Daniel, R.
Martinschitz, K. J.
Keckes, J.
Mitterer, C.
[J]. ACTA MATERIALIA, 2010, 58 (07) : 2621 - 2633
[7] Correlation of the superconducting transition temperature with an empirical pseudopotential determined from atomic spectra
Gambino, R. J.
Seiden, P. E.
[J]. PHYSICAL REVIEW B-SOLID STATE, 1970, 2 (09): : 3571 - 3577
[8] Gao MC., 2016, High Entropy Alloys: Fundamentals and Applications, DOI [10.1007/978-3-319-27013-5, DOI 10.1007/978-3-319-27013-5-11]
[9] Synthesis and structure of refractory high entropy alloy thin films based on the MoNbTaW system
Gruber, Georg C.
Lassnig, Alice
Zak, Stanislav
Gammer, Christoph
Cordill, Megan J.
Franz, Robert
[J]. SURFACE & COATINGS TECHNOLOGY, 2022, 439
[10] Microstructures and mechanical properties of TixNbMoTaW refractory high entropy alloys
Han, Z. D.
Luan, H. W.
Liu, X.
Chen, N.
Li, X. Y.
Shao, Y.
Yao, K. F.
[J]. MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 2018, 712 : 380 - 385

← 1 2 3 →