Topology Optimization of Capacitive MEMS Accelerometers for Seismic Applications

被引：4
|
作者：
Najafabadi, Hossein R. [1 ,2 ]
Goto, Tiago G. [2 ]
Martins, Thiago C. [2 ]
Barari, Ahmad [1 ]
Guerra Tsuzuki, Marcos de Sales [2 ]
机构：
[1] Univ Ontario Inst Technol Ontario Tech, Fac Engn & Appl Sci1, Oshawa, ON, Canada
[2] Univ Sao Paulo, Escola Politecn, Computat Geometry Lab, Sao Paulo, Brazil
来源：
ICGG 2022 - PROCEEDINGS OF THE 20TH INTERNATIONAL CONFERENCE ON GEOMETRY AND GRAPHICS | 2023年 / 146卷
基金：
巴西圣保罗研究基金会;
关键词：
Topology optimization; Inertial sensor; MEMS accelerometer; Sensitivity; Landslide monitoring; DESIGN;
D O I：
10.1007/978-3-031-13588-0_66
中图分类号：
TP39 [计算机的应用];
学科分类号：
081203 ; 0835 ;
摘要：
In this paper, a new approach is presented for topology optimization (TO) of differential capacitive accelerometers for seismic applications. This method presents the most efficient topology of an accelerometer to have maximum sensitivity in measuring seismic motion. On the other hand, the bandwidth and transverse sensitivity are limited to reduce the non-linearity and errors in the measured acceleration. The results show that TO gives creative geometry to improve the performance of an accelerometer with respect to the application and design limits. A variety of optimized designs have been presented herewith respect to the objective of performance and design constraints.
引用
收藏
页码：760 / 772
页数：13
相关论文
共 50 条
  • [31] Investigation of air damping effect in two kinds of capacitive MEMS accelerometers
    Yuming Mo
    Hao Zhou
    Guofen Xie
    Bin Tang
    Microsystem Technologies, 2018, 24 : 2017 - 2023
  • [32] Evaluation of a fully electrical test and calibration method for MEMS capacitive accelerometers
    Dumas, N.
    Azais, F.
    Mailly, F.
    Nouet, P.
    2008 IEEE 14TH INTERNATIONAL MIXED-SIGNALS, SENSORS, AND SYSTEMS TEST WORKSHOP, 2008, : 115 - 120
  • [33] Influence of Fringing Fields on Parallel Plate Capacitance for Capacitive MEMS Accelerometers
    Maj, Cezary
    Szermer, Michal
    2020 IEEE XVITH INTERNATIONAL CONFERENCE ON THE PERSPECTIVE TECHNOLOGIES AND METHODS IN MEMS DESIGN (MEMSTECH), 2020, : 82 - 85
  • [34] Design of Perforated Membrane for Low-Noise Capacitive MEMS Accelerometers
    Isobe, Atsushi
    Kamada, Yudai
    Oshima, Takashi
    Furubayashi, Yuki
    Sakuma, Noriyuki
    Takubo, Chisaki
    Tainaka, Yasushi
    Watanabe, Keiki
    Sekiguchi, Tomonori
    2018 IEEE SENSORS, 2018, : 312 - 315
  • [35] A study on beam configuration of MEMS capacitive accelerometers fabricated using SOI-MEMS technologies
    Jiannan L.
    Muro H.
    IEEJ Transactions on Sensors and Micromachines, 2017, 137 (08) : 247 - 251
  • [36] Design of Perforated Membrane for Low-Noise Capacitive MEMS Accelerometers
    Isobe, Atsushi
    Kamada, Yudai
    Takubo, Chisaki
    Furubayashi, Yuki
    Oshima, Takashi
    Sakuma, Noriyuki
    Sekiguchi, Tomonori
    IEEE SENSORS JOURNAL, 2020, 20 (03) : 1184 - 1190
  • [37] SiGe MEMS Accelerometers Combining a Large Bandwidth with a High Capacitive Sensitivity
    Chaudhuri, A. Ray
    Severi, S.
    Erismis, M. A.
    Francis, L. A.
    Witvrouw, A.
    26TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS, EUROSENSOR 2012, 2012, 47 : 742 - 745
  • [38] Vibration combined high temperature cycle tests for capacitive MEMS accelerometers
    Szucs, Z.
    Nagy, G.
    Hodossy, S.
    Rencz, M.
    Poppe, A.
    13TH INTERNATIONAL WORKSHOP ON THERMAL INVESTIGATION OF ICS AND SYSTEMS, PROCEEDINGS, 2007, : 215 - 219
  • [39] Investigation of air damping effect in two kinds of capacitive MEMS accelerometers
    Mo, Yuming
    Zhou, Hao
    Xie, Guofen
    Tang, Bin
    MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2018, 24 (04): : 2017 - 2023
  • [40] Intelligent Seismic Sensor with Double Three Component MEMS Accelerometers
    Fu Jihua
    Wang Jianjun
    Li Zhitao
    Liu Xiaoxi
    Wang Zhongyu
    6TH INTERNATIONAL SYMPOSIUM ON PRECISION ENGINEERING MEASUREMENTS AND INSTRUMENTATION, 2010, 7544
12345