Topology Optimization of Capacitive MEMS Accelerometers for Seismic Applications

被引：4

作者：

Najafabadi, Hossein R. ^{[1
,2
]}

Goto, Tiago G. ^{[2
]}

Martins, Thiago C. ^{[2
]}

Barari, Ahmad ^{[1
]}

Guerra Tsuzuki, Marcos de Sales ^{[2
]}

机构：

[1] Univ Ontario Inst Technol Ontario Tech, Fac Engn & Appl Sci1, Oshawa, ON, Canada

[2] Univ Sao Paulo, Escola Politecn, Computat Geometry Lab, Sao Paulo, Brazil

来源：

ICGG 2022 - PROCEEDINGS OF THE 20TH INTERNATIONAL CONFERENCE ON GEOMETRY AND GRAPHICS | 2023年 / 146卷

基金：

巴西圣保罗研究基金会;

关键词：

Topology optimization; Inertial sensor; MEMS accelerometer; Sensitivity; Landslide monitoring; DESIGN;

D O I：

10.1007/978-3-031-13588-0_66

中图分类号：

TP39 [计算机的应用];

学科分类号：

081203 ; 0835 ;

摘要：

In this paper, a new approach is presented for topology optimization (TO) of differential capacitive accelerometers for seismic applications. This method presents the most efficient topology of an accelerometer to have maximum sensitivity in measuring seismic motion. On the other hand, the bandwidth and transverse sensitivity are limited to reduce the non-linearity and errors in the measured acceleration. The results show that TO gives creative geometry to improve the performance of an accelerometer with respect to the application and design limits. A variety of optimized designs have been presented herewith respect to the objective of performance and design constraints.

引用

页码：760 / 772

页数：13

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