Formation of misoriented blocks during single-crystal CVD diamond growth

被引:0
作者
Klepikov, I. V. [1 ,2 ,3 ,10 ]
Koliadina, A. V. [1 ]
Vasilev, E. A. [4 ]
Isakove, R. V. [5 ]
Belashov, I. V. [6 ]
Alimov, P. N. [6 ]
Kudryavtsev, A. A. [7 ]
Antonov, A. V. [8 ]
Aneli, I. D. [1 ]
Liashcev, A. V. [9 ]
机构
[1] OOO NPK Almaz, 2 Voskova St,Sestroretsk, St Petersburg 197706, Russia
[2] St Petersburg State Univ, 7-9 Univ Skaya Embankment, St Petersburg 199034, Russia
[3] Russian Technol Univ MIREA, 78 Vernadsky Ave, Moscow 119454, Russia
[4] St Petersburg Min Univ, 2 21st Line, St Petersburg 199106, Russia
[5] New Diamond Technol LLC, 2 Voskova St, St Petersburg 197706, Russia
[6] OOO Almaznye Tekhnol, Petrozavodskaya St,9,Khovrino, Moscow, Russia
[7] OOO Tescan, Grazhdansky Prospekt 11, St Petersburg 195220, Russia
[8] AP Karpinsky Russian Geol Res Inst, 74 Sredniy Prospect, St Petersburg 199106, Russia
[9] AO Tethys Pro, POB 73, Moscow 117042, Russia
[10] OOO NPK Almaz, St Petersburg, Russia
基金
俄罗斯科学基金会;
关键词
CVD diamond; Internal structure; EBSD; Cathodoluminescence; Single crystal; Polycrystal; Epitaxy; Misorientation; RATE HOMOEPITAXIAL GROWTH; NITROGEN ADDITION; QUALITY; DEPOSITION; MORPHOLOGY; PHOSPHORESCENCE; TEMPERATURE;
D O I
10.1016/j.ijrmhm.2024.106571
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
This paper presents the results of a CVD diamond crystal growth experiment on an HPHT type IIa substrate (9 x 9 mm). Data acquired through cathodoluminescence and EBSD methods shed light on the aspects of the formation of a polycrystalline shell around a single crystal of CVD diamond. CVD diamond exhibits orientation features of the polycrystalline shell, microblocks, low-angle boundaries, and linear hexagonal macrostructures of dislocation origin. Crystal splitting occurs when the dislocation density increases from the geometric center to the periphery. Such CVD diamonds exhibit a continuous transition from single crystal to polycrystal through a block-type crystal.
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页数:8
相关论文
共 32 条
[1]   Coupled effect of nitrogen addition and surface temperature on the morphology and the kinetics of thick CVD diamond single crystals [J].
Achard, J. ;
Silva, F. ;
Brinza, O. ;
Tallaire, A. ;
Gicquel, A. .
DIAMOND AND RELATED MATERIALS, 2007, 16 (4-7) :685-689
[2]   High quality MPACVD diamond single crystal growth: high microwave power density regime [J].
Achard, J. ;
Silva, F. ;
Tallaire, A. ;
Bonnin, X. ;
Lombardi, G. ;
Hassouni, K. ;
Gicquel, A. .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2007, 40 (20) :6175-6188
[3]   Chemical vapour deposition synthetic diamond: materials, technology and applications [J].
Balmer, R. S. ;
Brandon, J. R. ;
Clewes, S. L. ;
Dhillon, H. K. ;
Dodson, J. M. ;
Friel, I. ;
Inglis, P. N. ;
Madgwick, T. D. ;
Markham, M. L. ;
Mollart, T. P. ;
Perkins, N. ;
Scarsbrook, G. A. ;
Twitchen, D. J. ;
Whitehead, A. J. ;
Wilman, J. J. ;
Woollard, S. M. .
JOURNAL OF PHYSICS-CONDENSED MATTER, 2009, 21 (36)
[4]   Dislocations in diamond: Dissociation into partials and their glide motion [J].
Blumenau, AT ;
Jones, R ;
Frauenheim, T ;
Willems, B ;
Lebedev, OI ;
Van Tendeloo, G ;
Fisher, D ;
Martineau, PM .
PHYSICAL REVIEW B, 2003, 68 (01)
[5]   HPHT growth and x-ray characterization of high-quality type IIa diamond [J].
Burns, R. C. ;
Chumakov, A. I. ;
Connell, S. H. ;
Dube, D. ;
Godfried, H. P. ;
Hansen, J. O. ;
Haertwig, J. ;
Hoszowska, J. ;
Masiello, F. ;
Mkhonza, L. ;
Rebak, M. ;
Rommevaux, A. ;
Setshedi, R. ;
Van Vaerenbergh, P. .
JOURNAL OF PHYSICS-CONDENSED MATTER, 2009, 21 (36)
[6]  
D'Haenens-Johansson UFS, 2022, REV MINERAL GEOCHEM, V88, P689, DOI 10.2138/rmg.2022.88.13
[7]   Effects of nitrogen impurities on the CVD growth of diamond: step bunching in theory and experiment [J].
de Theije, FK ;
Schermer, JJ ;
van Enckevort, WJP .
DIAMOND AND RELATED MATERIALS, 2000, 9 (08) :1439-1449
[8]  
Deryagin B. V., 1970, Russ. Chem. Rev, V39, P783, DOI [10.1070/RC1970v039n09ABEH002022, DOI 10.1070/RC1970V039N09ABEH002022]
[9]   Theoretical studies on 100 dislocations in single crystal CVD diamond [J].
Fujita, N. ;
Blumenau, A. T. ;
Jones, R. ;
Oberg, S. ;
Briddon, P. R. .
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2006, 203 (12) :3070-3075
[10]   DIAMOND GENESIS IN A MULTIPLY-CONSTRAINED MODEL [J].
HAGGERTY, SE .
NATURE, 1986, 320 (6057) :34-37