共 50 条
[47]
Initiated-chemical vapor deposition of organosilicon layers: Monomer adsorption, bulk growth, and process window definition
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,
2012, 30 (04)
[49]
Transition between kinetic and mass transfer regimes in the initiated chemical vapor deposition from ethylene glycol diacrylate
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,
2009, 27 (05)
:1135-1143