Nozzle-based precision patterning with micro-/nano fluidics integrated cantilevers

被引：2
|
作者：
Ko, Juhee [1 ,2 ]
Fredj, Nada [1 ,2 ]
Adhawiyah, Rafita Erli [1 ,2 ]
Lee, Jungchul [1 ,2 ]
机构：
[1] Korea Adv Inst Sci & Technol KAIST, Dept Mech Engn, Daejeon 34141, South Korea
[2] Korea Adv Inst Sci & Technol KAIST, Ctr Extreme Thermal Phys & Mfg, Daejeon 34141, South Korea
来源：
JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY | 2023年 / 37卷 / 02期
基金：
新加坡国家研究基金会;
关键词：
Atomic force microscopy (AFM); Channel cantilever; Dispensing; Micro-patterning; Nozzle; Precision manufacturing; ATOMIC-FORCE MICROSCOPY; HOLLOW AFM CANTILEVER; FOUNTAIN PEN; FABRICATION; DEPOSITION; PROBE; OPTIMIZATION; NANOPIPETTE; ASPIRATION; DELIVERY;
D O I：
10.1007/s12206-023-0130-5
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
As the requirements of micro-/nano printing technologies are continuously increasing, direct writing technologies on a submicron scale are drawing attention. One of the promising methods is a nozzle-based precision patterning with atomic force microscopy (AFM), which has the advantages of high position controllability including nozzle-to-substrate distance feedback under a nanometer scale. It uses a fluidic channel and a dispensing nozzle integrated with a cantilever structure for deflection monitoring. In this paper, we introduce micro/nanofluidics integrated cantilevers for nozzle-based precision patterning in several considerations: 1) numerous fabrication strategies for nozzle-integrated fluidic cantilevers; 2) methods for liquid transport; 3) methods for pattern formation; and 4) applications with various printing materials.
引用
收藏
页码：887 / 900
页数：14
相关论文
共 37 条
  • [21] A durable superhydrophobic coating based on inherent nano/micro-integrated materials
    Bai, Yuxing
    Zhang, Haiping
    Zhu, Jesse
    Shao, Yuanyuan
    Zhang, Hui
    PROGRESS IN ORGANIC COATINGS, 2023, 184
  • [22] Nanosecond Laser "Pulling" Patterning of Micro-Nano Structures on Zr-Based Metallic Glass
    Cui, Mingming
    Huang, Hu
    Zhang, Lin
    Yan, Jiwang
    SMALL, 2023, 19 (14)
  • [23] Micro-/nano-fluidic devices and in vivo fluorescence imaging based on quantum dots for cytologic diagnosis
    Luo, Minchuan
    Yukawa, Hiroshi
    Baba, Yoshinobu
    LAB ON A CHIP, 2022, 22 (12) : 2223 - 2236
  • [24] Single-Step Process for Titanium Surface Micro- and Nano-Structuring and In Situ Silver Nanoparticles Formation by Ultra-Short Laser Patterning
    Aceti, Dante Maria
    Filipov, Emil
    Angelova, Liliya
    Sotelo, Lamborghini
    Fontanot, Tommaso
    Yousefi, Peyman
    Christiansen, Silke
    Leuchs, Gerd
    Stanimirov, Stanislav
    Trifonov, Anton
    Buchvarov, Ivan
    Daskalova, Albena
    MATERIALS, 2022, 15 (13)
  • [25] A novel micro/nano fabrication process based on the combined use of dielectrophoresis, electroosmotic flow, and electrodeposition for surface patterning
    Perez-Gonzalez, Victor H.
    Vinh Ho
    Vazquez-Pinon, Matias
    Martinez-Chapa, Sergio O.
    Kulinsky, Lawrence
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2015, 25 (11)
  • [26] Simple micro-patterning of high conductive polymer with UV-nano-imprinted patterned substrate and ethylene glycol-based second doping
    Takamatsu, Seiichi
    Kurihara, Kazuma
    Yamashita, Takahiro
    Itoh, Toshihiro
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2014, 24 (04)
  • [27] Highly inorganic titania based sol-gel as directly patternable resist for micro- and nano- structured surfaces
    Zanchetta, E.
    Auzelyte, V.
    Brugger, J.
    Savegnago, A. V.
    Della Giustina, G.
    Brusatin, G.
    MICROELECTRONIC ENGINEERING, 2012, 98 : 176 - 179
  • [28] Versatile Micro and Nano Patterning Technique for TiO2 and TiN-Based Sol-Gel Thin Films
    Valour, Arnaud
    Hochedel, Marion
    Royon, Maxime
    Usuga Higuita, Maria Alejandro
    Crespo-Monteiro, Nicolas
    Jourlin, Yves
    ADVANCED MATERIALS INTERFACES, 2022, 9 (29)
  • [29] Femtosecond laser direct writing Bombyx mori sericin-based nanocomposites into intrinsically soft wearable micro-/nano-electronics
    Liang, Qi
    Xu, Qian
    Yang, Gongwen
    Xu, Yanting
    Huang, Hanxuan
    Hou, Zhishan
    Shao, Zhengzhong
    Wang, Ming
    Sun, Yun-Lu
    NANOSCALE, 2024, 16 (47) : 21869 - 21880
  • [30] Direct patterning of metallic micro/nano-structures on flexible polymer substrates by roller-based contact printing and infrared heating
    Chen, Chun-Hung
    Yu, Te-Hui
    Lee, Yung-Chun
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2010, 20 (02)
1234