Nozzle-based precision patterning with micro-/nano fluidics integrated cantilevers

被引：2
|
作者：
Ko, Juhee [1 ,2 ]
Fredj, Nada [1 ,2 ]
Adhawiyah, Rafita Erli [1 ,2 ]
Lee, Jungchul [1 ,2 ]
机构：
[1] Korea Adv Inst Sci & Technol KAIST, Dept Mech Engn, Daejeon 34141, South Korea
[2] Korea Adv Inst Sci & Technol KAIST, Ctr Extreme Thermal Phys & Mfg, Daejeon 34141, South Korea
来源：
JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY | 2023年 / 37卷 / 02期
基金：
新加坡国家研究基金会;
关键词：
Atomic force microscopy (AFM); Channel cantilever; Dispensing; Micro-patterning; Nozzle; Precision manufacturing; ATOMIC-FORCE MICROSCOPY; HOLLOW AFM CANTILEVER; FOUNTAIN PEN; FABRICATION; DEPOSITION; PROBE; OPTIMIZATION; NANOPIPETTE; ASPIRATION; DELIVERY;
D O I：
10.1007/s12206-023-0130-5
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
As the requirements of micro-/nano printing technologies are continuously increasing, direct writing technologies on a submicron scale are drawing attention. One of the promising methods is a nozzle-based precision patterning with atomic force microscopy (AFM), which has the advantages of high position controllability including nozzle-to-substrate distance feedback under a nanometer scale. It uses a fluidic channel and a dispensing nozzle integrated with a cantilever structure for deflection monitoring. In this paper, we introduce micro/nanofluidics integrated cantilevers for nozzle-based precision patterning in several considerations: 1) numerous fabrication strategies for nozzle-integrated fluidic cantilevers; 2) methods for liquid transport; 3) methods for pattern formation; and 4) applications with various printing materials.
引用
收藏
页码：887 / 900
页数：14
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