Flexible Piezoresistive Sensors from Polydimethylsiloxane Films with Ridge-like Surface Structures

被引：2

作者：

Liu, Ming ^{[1
]}

Liu, Xianchao ^{[1
,2
,3
]}

Yang, Fuqian ^{[4
]}

机构：

[1] Fuzhou Univ, Sch Mech Engn & Automat, Fujian Prov Key Lab Terahertz Funct Devices & Inte, Fuzhou 350108, Peoples R China

[2] Putian Univ, Engn Res Ctr CAD CAM Fujian Univ, Putian 351100, Peoples R China

[3] Huazhong Univ Sci & Technol, Sch Mech Sci & Engn, State Key Lab Digital Mfg Equipment & Technol, Wuhan 430074, Peoples R China

[4] Univ Kentucky, Dept Chem & Mat Engn, Mat Program, Lexington, KY 40506 USA

来源：

MICROMACHINES | 2023年 / 14卷 / 10期

基金：

中国国家自然科学基金;

关键词：

flexible sensor; PDMS; surface structure; bio-applications; PRESSURE SENSOR; HIGH-SENSITIVITY; STRAIN SENSOR; PERFORMANCE; COMPOSITE; ARRAYS; RANGE;

D O I：

10.3390/mi14101940

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Developing flexible sensors and actuators is of paramount importance for wearable devices and systems. In this research, we developed a simple and facile technique to construct flexible piezoresistive sensors from polydimethylsiloxane films with ridge-like surface structures and laser-induced porous graphene. Using a replication strategy, we prepared the ridge-like surface structures from sandpapers. The piezoresistive sensors exhibit excellent sensitivity with a response time of less than 50 ms and long-term cyclic stability under mechanical loading. The smallest weight they can sense is similar to 96 mg. We demonstrated applications of the piezoresistive sensors in the sensing of bio-related activities, including muscle contraction, finger flexion, wrist flexion, elbow bending, knee bending, swallowing, respiration, sounds, and pulses.

引用

页数：16