[1] Univ Calif Berkeley, Dept Mat Sci & Engn, Berkeley, CA 94720 USA
[2] Rochester Inst Technol, Dept Mech Engn, Rochester, NY 14623 USA
[3] Samsung Semicond Inc, Samsung Adv Inst Technol Amer, Adv Mat Lab, Cambridge, MA 02138 USA
[4] Lawrence Berkeley Natl Lab, Natl Ctr Elect Microscopy, Mol Foundry, 1 Cyclotron Rd, Berkeley, CA 94720 USA
[5] Lawrence Berkeley Natl Lab, Mat Sci Div, Berkeley, CA 94720 USA