Resonant Transducers Consisting of Graphene Ribbons with Attached Proof Masses for NEMS Sensors

被引：8

作者：

Fan, Xuge ^{[1
,2
]}

Moreno-Garcia, Daniel ^{[3
]}

Ding, Jie ^{[4
]}

Gylfason, Kristinn B. ^{[2
]}

Villanueva, Luis Guillermo ^{[3
]}

Niklaus, Frank ^{[2
]}

机构：

[1] Beijing Inst Technol, Adv Res Inst Multidisciplinary Sci, Beijing 100081, Peoples R China

[2] KTH Royal Inst Technol, Sch Elect Engn & Comp Sci, Div Micro & Nanosyst, SE-10044 Stockholm, Sweden

[3] Ecole Polytech Fed Lausanne EPFL, Adv NEMS Grp, CH-1015 Lausanne, Switzerland

[4] Beijing Inst Technol, Sch Integrated Circuits & Elect, Beijing 100081, Peoples R China

来源：

ACS APPLIED NANO MATERIALS | 2023年 / 7卷 / 01期

基金：

瑞典研究理事会; 中国国家自然科学基金; 瑞士国家科学基金会; 北京市自然科学基金;

关键词：

graphene; resonators; suspendedgraphene; nonlinear resonance; NEMS; MECHANICAL RESONATORS; ACCELEROMETER; SIMULATION;

D O I：

10.1021/acsanm.3c03642

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The unique mechanical and electrical properties of graphene make it an exciting material for nanoelectromechanical systems (NEMS). NEMS resonators with graphene springs facilitate studies of graphene's fundamental material characteristics and thus enable innovative device concepts for applications such as sensors. Here, we demonstrate resonant transducers with ribbon-springs made of double-layer graphene and proof masses made of silicon and study their nonlinear mechanics at resonance both in air and in vacuum by laser Doppler vibrometry. Surprisingly, we observe spring-stiffening and spring-softening at resonance, depending on the graphene spring designs. The measured quality factors of the resonators in a vacuum are between 150 and 350. These results pave the way for a class of ultraminiaturized nanomechanical sensors such as accelerometers by contributing to the understanding of the dynamics of transducers based on graphene ribbons with an attached proof mass.

引用

页码：102 / 109

页数：8

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