Improved self-heating extraction with RF technique at cryogenic temperatures

This work studies self-heating effect using the modified RF characterization technique at cryogenic temperatures down to 77 K. It is shown that neglecting the transition related to the substrate effect in the output conductance frequency response can result in a strong underestimation of the thermal resistance, especially at bias conditions close to the threshold voltage (Vth) region and alter its temperature, length and bias dependencies which is important to consider for device modelling.