Effects of elevated-temperature deposition on the atomic structure of amorphous Ta2O5 films

被引:1
作者
Prasai, K. [1 ]
Lee, K. [2 ]
Baloukas, B. [3 ]
Cheng, H-p. [4 ]
Fazio, M. [5 ]
Martinu, L. [3 ]
Mehta, A. [6 ]
Menoni, C. S. [7 ]
Schiettekatte, F. [8 ]
Shink, R. [8 ]
Shyam, B. [9 ]
Vajente, G. [10 ]
Fejer, M. M. [1 ]
Bassiri, R. [1 ]
机构
[1] Stanford Univ, EL Ginzton Lab, Stanford, CA 94305 USA
[2] Sungkyunkwan Univ, Seoul 03063, South Korea
[3] Ecole Polytech Montreal, Montreal, PQ H3T 1J4, Canada
[4] Univ Florida, Dept Phys, Gainesville, FL 32611 USA
[5] Univ Strathclyde, Dept Biomed Engn, SUPA, Glasgow City G1 1QE, Scotland
[6] SLAC Natl Accelerator Lab, Menlo Pk, CA 94025 USA
[7] Colorado State Univ, Dept Elect & Comp Engn, Ft Collins, CO 80523 USA
[8] Univ Montreal, Dept Phys, Montreal, PQ H3T 1J4, Canada
[9] Xerion Adv Battery Corp, Kettering, OH 45420 USA
[10] CALTECH, LIGO Lab, Pasadena, CA 91125 USA
基金
加拿大自然科学与工程研究理事会; 新加坡国家研究基金会; 美国国家科学基金会;
关键词
ULTRASTABLE GLASSES; TRANSITION; ORDER; MODEL;
D O I
10.1063/5.0170100
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Brownian thermal noise as a result of mechanical loss in optical coatings will become the dominant source of noise at the most sensitive frequencies of ground-based gravitational-wave detectors. Experiments found, however, that a candidate material, amorphous Ta2O5, is unable to form an ultrastable glass and, consequently, to yield a film with significantly reduced mechanical loss through elevated-temperature deposition alone. X-ray scattering PDF measurements are carried out on films deposited and subsequently annealed at various temperatures. Inverse atomic modeling is used to analyze the short and medium range features in the atomic structure of these films. Furthermore, in silico deposition simulations of Ta2O5 are carried out at various substrate temperatures and an atomic level analysis of the growth at high temperatures is presented. It is observed that upon elevated-temperature deposition, short range features remain identical, whereas medium range order increases. After annealing, however, both the short and medium range orders of films deposited at different substrate temperatures are nearly identical. A discussion on the surface diffusion and glass transition temperatures indicates that future pursuits of ultrastable low-mechanical-loss films through elevated temperature deposition should focus on materials with a high surface mobility, and/or lower glass transition temperatures in the range of achievable deposition temperatueres.
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页数:8
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