Bending sensor based on flexible spin valve

被引：1
作者：
Naumova, L., I [1 ]
Zavornitsyn, R. S. [1 ]
Milyaev, M. A. [1 ]
Bebenin, N. G. [1 ]
Pavlova, A. Y. [1 ]
Makarova, M., V [1 ]
Maksimova, I. K. [1 ]
Proglyado, V. V. [1 ]
Zakharov, A. A. [1 ]
Ustinov, V. V. [1 ]
机构：
[1] Russian Acad Sci, MN Miheev Inst Met Phys, Ural Branch, S Kovalevskoi St 18, Ekaterinburg 620990, Russia
来源：
CHINESE PHYSICS B | 2023年 / 32卷 / 05期
基金：
俄罗斯基础研究基金会;
关键词：
spin valve; polymer substrate; magnetostriction; magnetic anisotropy; MAGNETIC-PROPERTIES; MAGNETORESISTANCE; MODULUS;
D O I：
10.1088/1674-1056/ac8923
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
Flexible spin valves were prepared by magnetron sputtering on polyimide substrates. The buffer layer that reduces significantly the effect of the polymer substrate on the spin valve microstructure and magnetoresistive properties was revealed. Bending deformation was applied to the microobjects based on the flexible spin valves in parallel to anisotropy axes. It was revealed that during the bend the magnetoresistance changes due to the joint impact of both the change of the magnetic field projection on the film plane and the change of the magnetic properties of the ferromagnetic layers. The obtained dependences have been used in construction of bending sensor, in which the flexible spin valve microstripes were united into the Wheatstone bridge.
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页数：7
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