A field programmable gate array based Langmuir probe system for measurement of plasma parameters at 500 kHz in a high-power impulse magnetron sputtering plasma

被引：0

作者：

Hickling, C. J. ^{[1
,2
]}

Hall, S. ^{[2
]}

Harrison, J. R. ^{[2
]}

Sharples, R. ^{[3
]}

Bradley, J. W. ^{[1
]}

机构：

[1] Univ Liverpool, Dept Elect Engn & Elect, Brownlow Hill, Liverpool L69 3GJ, England

[2] Culham Sci Ctr, UK Atom Energy Author, Abingdon OX14 3DB, Oxfordshire, England

[3] Univ Durham, Dept Phys, Lower Mountjoy,South Rd, Durham DH1 3LE, England

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2024年 / 95卷 / 03期

基金：

英国工程与自然科学研究理事会;

关键词：

Electron temperature - Field programmable gate arrays (FPGA) - Logic gates - Magnetron sputtering;

D O I：

10.1063/5.0174458

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

By utilizing Field Programmable Gate Arrays in a configuration similar to that of the Mirror Langmuir Probe, it is possible to bias a single probe at three precise voltages in sequence. These voltages can be dynamically adjusted in real-time based on the measured plasma electron temperature to ensure the transition region is always sampled. The first results have been obtained by employing this method and have generated real-time outputs of electron temperature, ion saturation current, and floating potential on a low temperature pulsed-DC magnetron at 500 kHz. These results are in good agreement with the analysis of a conventionally swept Langmuir probe. This probe is designed with the intention of being implemented on MAST-U to aid in the study of exhaust physics and enable further investigation into filamentary behavior.

引用

页数：7

共 13 条

[1]

C. Hickling, 2023, All code can be found in Git repository

[2] Convective transport by intermittent blob-filaments: Comparison of theory and experiment [J].

D'Ippolito, D. A. ;

Myra, J. R. ;

Zweben, S. J. .

PHYSICS OF PLASMAS, 2011, 18 (06)

[3]

Estrin F. L., 2016, Ph.D. thesis

[4] Triple probe interrogation of spokes in a HiPIMS discharge [J].

Estrin, F. Lockwood ;

Karkari, S. K. ;

Bradley, J. W. .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2017, 50 (29)

[5]

Goldschmidt R. E., 1964, Applications of division by convergence

[6] Mirror Langmuir probe: A technique for real-time measurement of magnetized plasma conditions using a single Langmuir electrode [J].

LaBombard, B. ;

Lyons, L. .

REVIEW OF SCIENTIFIC INSTRUMENTS, 2007, 78 (07)

[7]

Leban, 2014, Red pitaya user manual

[8]

Lyons L. A., 2005, Massachusetts Institute of Technology

[9] First application of a digital mirror Langmuir probe for real-time plasma diagnosis [J].

McCarthy, W. ;

Golfinopoulos, T. ;

Woller, K. B. ;

Vincent, C. ;

Kuang, A. ;

Labombard, B. .

REVIEW OF SCIENTIFIC INSTRUMENTS, 2021, 92 (10)

[10] Short- and long-term plasma phenomena in a HiPIMS discharge [J].

Poolcharuansin, P. ;

Bradley, J. W. .

PLASMA SOURCES SCIENCE & TECHNOLOGY, 2010, 19 (02)

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