Reem-Shape Phononic Crystal for Q Anchor Enhancement of Thin-Film-Piezoelectric-on-Si MEMS Resonator

被引：6

作者：

Awad, Mohammed ^{[1
]}

Workie, Temesgen Bailie ^{[1
]}

Bao, Jing-Fu ^{[1
]}

Hashimoto, Ken-ya ^{[1
]}

机构：

[1] Univ Elect Sci & Technol China, Sch Integrated Circuits Sci & Engn, Chengdu 611731, Peoples R China

来源：

MICROMACHINES | 2023年 / 14卷 / 08期

基金：

中国国家自然科学基金;

关键词：

MEMS resonators; TPoS; phononic crystals; quality factor; anchor loss;

D O I：

10.3390/mi14081540

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

This paper proposes a reem-shaped phononic crystal for the performance enhancement of TPoS resonators. The proposed phononic crystal offers an ultra-wide acoustic band gap that prevents energy leakage through the supporting substrate upon its placement at the anchoring boundary, resulting in significant improvements in the resonator quality factor. Simulated results show reem-shape phononic crystals generate a band gap up to 175 MHz with a BG of 90% and enhance the anchor quality factor from 180,000 to 6,000,000 and the unloaded quality factor from 133,000 to 160,000, representing 33.3-fold and 1.2-fold improvements, respectively.

引用

页数：15

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