[1] Tsinghua Univ, Dept Mech Engn, Beijing Key Lab Precis Ultraprecis Mfg Equipments, Beijing 100084, Peoples R China
[2] Tsinghua Univ, Dept Mech Engn, State Key Lab Tribol Adv Equipment, Beijing 100084, Peoples R China
[3] Tsinghua Univ, Shenzhen Int Grad Sch, Div Adv Mfg, Shenzhen 518055, Peoples R China
[4] Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100190, Peoples R China