[1] Natl Cheng Kung Univ NCKU, Inst Microelect, Dept Elect Engn, Lasers & Photon Lab, 1 Univ Rd, Tainan 70101, Taiwan
[2] Ind Technol Res Inst, Tainan 734, Taiwan
[3] Natl Kaohsiung Univ Sci & Technol, Dept Microelect Engn, 142 Haizhuan Rd, Kaohsiung 811, Taiwan