[1] Friedrich Alexander Univ Erlangen Nurnberg, Electron Devices, Cauerstr 6, D-91058 Erlangen, Germany
[2] Friedrich Alexander Univ Erlangen Nurnberg, Inst Particle Technol, Cauerstr 4, D-91058 Erlangen, Germany
[3] Fraunhofer Inst Integrated Syst & Device Technol I, Schottkystr 10, D-91058 Erlangen, Germany