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- [21] Confocal position alignment in high precision wavefront error metrology using Shack-Hartmann wavefront sensor OPTICAL MICROLITHOGRAPHY XXIX, 2016, 9780
- [28] Simulation of the sensing performance of a Shack-Hartmann wavefront sensor related to the lenslet array INTERNATIONAL CONFERENCE ON OPTICS IN PRECISION ENGINEERING AND NANOTECHNOLOGY (ICOPEN 2011), 2011, 19