Modeling of Rapid Pam Systems Based on Electrothermal Micromirror for High-Resolution Facial Angiography

被引:1
作者
Xia, Yuanlin [1 ]
Wang, Yujie [1 ]
Liang, Tianxiang [1 ]
Peng, Zhen [1 ]
He, Liang [1 ]
Wang, Zhuqing [1 ]
机构
[1] Sichuan Univ, Sch Mech Engn, Chengdu 610065, Peoples R China
基金
国家重点研发计划;
关键词
photoacoustic microscopy; MEMS; electrothermal micromirror; portable;
D O I
10.3390/s23052592
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
In this paper, a portable photoacoustic microscopy (PAM) system is proposed based on a large stroke electrothermal micromirror to achieve high resolution and fast imaging. The crucial micromirror in the system realizes a precise and efficient 2-axis control. Two different designs of electrothermal actuators with "O" and "Z" shape are evenly located around the four directions of mirror plate. With a symmetrical structure, the actuator realized single direction drive only. The finite element modelling of both two proposed micromirror has realized a large displacement over 550 mu m and the scan angle over +/- 30.43 degrees at 0-10 V DC excitation. In addition, the steady-state and transient-state response show a high linearity and quick response respectively, which can contribute to a fast and stable imaging. Using the Linescan model, the system achieves an effective imaging area of 1 mm x 3 mm in 14 s and 1 mm x 4 mm in 12 s for the "O" and "Z" types, respectively. The proposed PAM systems have advantages in image resolution and control accuracy, indicating a significant potential in the field of facial angiography.
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页数:13
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