Multicomponent Gas Detection Method via Dynamic Temperature Modulation Measurements Based on Semiconductor Gas Sensor

被引:46
作者
Ji, Hanyang [1 ]
Mi, Chunjin [1 ]
Yuan, Zhenyu [1 ,2 ,3 ]
Liu, Yang [1 ]
Zhu, Hongmin [1 ]
Meng, Fanli [1 ,2 ,3 ]
机构
[1] Northeastern Univ, Coll Informat Sci & Engn, Shenyang 110819, Peoples R China
[2] Northeastern Univ, Coll Informat Sci & Engn, State Key Lab Synthet Automat Proc Ind, Shenyang 110819, Peoples R China
[3] Hebei Key Lab Micronano Precis Opt Sensing & Measu, Qinhuangdao 066004, Peoples R China
基金
中国国家自然科学基金;
关键词
Sensors; Temperature sensors; Temperature measurement; Heating systems; Gases; Temperature; Gas detectors; Dynamic temperature modulation; semiconductor gas sensors; the multicomponent gas; SELECTIVITY; CALIBRATION; RESPONSES; SYSTEM; ARRAY;
D O I
10.1109/TIE.2022.3194629
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
Leakage of organic gas in an industrial environment can easily cause fire and explosion accidents. Rapid detection of gases type and concentration is the premise for emergency treatment of these situations. Typically, the single semiconductor sensor cannot detect multicomponent gas. Here, a new multicomponent gas detection method was proposed based on the temperature-response relationship of the sensor. This method has low power consumption, low cost, and long-term monitoring, which can guide the future exploration of deployable sensors. First, the parameters were optimized according to cosine distance to reflect the maximum difference in the temperature-response relationship. Then coordinate system transformation was carried out to further magnify the difference between gases. Finally, the multicomponent gas was recognized by using rational Taylor function fitting. As a proof of concept, we measured the type and concentration of toluene and butanone multicomponent gas with a mean error of 6.34% and 4.32%, respectively. We analyzed the gas-sensing response mechanism, the theoretical support of the optimized parameters, and the causes of local errors. As a universal method, binary component gas detection was explored containing toluene, butanone, acetic anhydride, acetone, and diethyl ether.
引用
收藏
页码:6395 / 6404
页数:10
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