Demonstration of B-ion-implanted p-BaSi2/n-Si heterojunction solar cells

被引:3
作者
Aonuki, Sho [1 ]
Narita, Shunsuke [1 ]
Takayanagi, Kaori [1 ]
Iwai, Ai [1 ]
Yamashita, Yudai [1 ]
Toko, Kaoru [2 ]
Suemasu, Takashi [2 ]
机构
[1] Univ Tsukuba, Grad Sch Sci & Technol, Degree programs Pure & Appl Sci, Tsukuba, Ibaraki 3058573, Japan
[2] Univ Tsukuba, Fac Pure & Appl Sci, Dept Appl Phys, Tsukuba, Ibaraki 3058573, Japan
关键词
solar cell; ion implantation; BaSi2; post-annealing; activation; SEMICONDUCTING BASI2 FILMS; EPITAXIAL-GROWTH; THIN-FILMS;
D O I
10.35848/1347-4065/acab08
中图分类号
O59 [应用物理学];
学科分类号
摘要
The implantation of B atoms into BaSi2 epitaxial films grown by molecular beam epitaxy was performed to form p-type BaSi2 films. It was revealed by Raman spectroscopy that the ion-implantation damage induced in the implanted BaSi2 films was recovered by post-annealing at 600 degrees C or higher temperatures for 64 min. The hole concentration increased up to 3.1 x 10(18) cm(-3) at room temperature, indicating that B-ion-implanted p-BaSi2 films are applicable as a hole transport layer. The B-ion-implanted p-BaSi2/n-Si heterojunction solar cells showed rectifying current-voltage characteristics under AM1.5 G illumination and the internal quantum efficiency reached 72% at the wavelength of 900 nm. The conversation efficiency was 2.2%. These results open new routes for the formation methods of BaSi2 solar cells.
引用
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页数:6
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