Molecular beam epitaxial growth of multilayer 2D-boron nitride on Ni substrates from borazine and plasma-activated nitrogen

被引:5
作者
Hadid, Jawad [1 ]
Colambo, Ivy [2 ]
Avila, Jose [3 ]
Plaud, Alexandre [4 ,5 ]
Boyaval, Christophe [1 ]
Deresmes, Dominique [1 ]
Nuns, Nicolas [6 ]
Dudin, Pavel [3 ]
Loiseau, Annick [5 ]
Barjon, Julien [4 ]
Wallart, Xavier [1 ]
Vignaud, Dominique [1 ]
机构
[1] Univ Polytech Hauts France, Univ Lille, CNRS, Cent Lille,JUNIA ISEN,IEMN,UMR 8520, F-59000 Lille, France
[2] Univ Philippines Los Banos, Inst Math Sci Phys, Laguna 4031, Philippines
[3] Synchrotron SOLEIL, F-91192 Gif sur Yvette, France
[4] Univ Paris Saclay, UVSQ, CNRS, Grp Etud Matiere Condensee, 45 Ave Etats Unis, F-78035 Versailles, France
[5] Univ Paris Saclay, CNRS, ONERA, Lab Etud Microstruct LEM, 29 Ave dela Div Leclerc, F-92320 Chatillon, France
[6] Univ Artois, Univ Lille, IMEC Inst Michel Eugene Chevreul, CNRS,Cent Lille,ENSCL, F-59000 Lille, France
关键词
boron nitride; epitaxy; 2D material; stacking; borazine; HEXAGONAL BORON-NITRIDE; SURFACE SELF-DIFFUSION; HIGH-QUALITY; NICKEL; GRAPHENE; PARAMETERS; ENERGY; FILMS;
D O I
10.1088/1361-6528/ac99e5
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
2D boron nitride (2D-BN) was synthesized by gas-source molecular beam epitaxy on polycrystalline and monocrystalline Ni substrates using gaseous borazine and active nitrogen generated by a remote plasma source. The excess of nitrogen atoms allows to overcome the thickness self-limitation active on Ni when using borazine alone. The nucleation density and the shape of the 2D-BN domains are clearly related to the Ni substrate preparation and to the growth parameters. Based on spatially-resolved photoemission spectroscopy and on the detection of the pi plasmon peak, we discuss the origin of the N1s and B1s components and their relationship with an electronic coupling at the interface. After optimization of the growth parameters, a full 2D-BN coverage is obtained, although the material thickness is not evenly distributed. The 2D-BN presents a granular structure on (111) oriented Ni grains, showing a rather poor cristallographic quality. On the contrary, high quality 2D-BN is found on (101) and (001) Ni grains, where triangular islands are observed whose lateral size is limited to similar to 20 mu m.
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页数:12
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