A Two-Dimensional Precision Level for Real-Time Measurement Based on Zoom Fast Fourier Transform

被引:1
|
作者
Fu, Haijin [1 ,2 ]
Wang, Zheng [1 ,2 ]
Lin, Xionglei [1 ,2 ]
Xing, Xu [1 ,2 ]
Yang, Ruitao [1 ,2 ]
Yang, Hongxing [1 ,2 ]
Hu, Pengcheng [1 ,2 ]
Ding, Xuemei [1 ,2 ]
Yu, Liang [1 ,2 ]
机构
[1] Harbin Inst Technol, Ultraprecis Optoelect Instrument Engn Ctr, Sch Instrument Sci & Engn, Harbin 150080, Peoples R China
[2] Harbin Inst Technol, Minist Ind & Informat Technol, Key Lab Ultraprecis Intelligent Instrumentat, Harbin 150080, Peoples R China
关键词
precision level; homodyne interference; zoom FFT; real-time angle measurement; SENSOR; ERRORS;
D O I
10.3390/mi14112028
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
This paper proposes a two-dimensional precision level for real-time measurement using a zoom fast Fourier transform (zoom FFT)-based decoupling algorithm that was developed and integrated in an FPGA. This algorithm solves the contradiction between obtaining high resolution and obtaining high measurement speed, and achieves both high angle-resolution measurement and real-time measurement. The proposed level adopts a silicone-oil surface as the angle-sensitive interface and combines the principle of homodyne interference. By analyzing the frequency of the interference fringes, the angle variation can be determined. The zoom-FFT-based decoupling algorithm improves the system's frequency resolution of the interference fringes, thereby significantly enhancing the angle resolution. Furthermore, this algorithm improves the efficiency of angle decoupling, while the angle decoupling process can also be transplanted to the board to realize real-time measurement of the level. Finally, a prototype based on the level principle was tested to validate the effectiveness of the proposed method. The principle analysis and test results showed that the angle resolution of the prototype improved from 9 arcsec to about 0.1 arcsec using this angle-solution method. At the same time, the measurement repeatability of the prototype was approximately +/- 0.2 arcsec. In comparison with a commercial autocollimator, the angle measurement accuracy reached +/- 0.6 arcsec.
引用
收藏
页数:14
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