Electron dynamics in planar radio frequency magnetron plasmas: III. Comparison of experimental investigations of power absorption dynamics to simulation results

被引：8

作者：

Berger, B. ^{[1
]}

Eremin, D. ^{[2
]}

Oberberg, M. ^{[1
]}

Engel, D. ^{[2
]}

Woelfel, C. ^{[3
]}

Zhang, Q-Z ^{[4
]}

Awakowicz, P. ^{[1
]}

Lunze, J. ^{[3
]}

Brinkmann, R. P. ^{[2
]}

Schulze, J. ^{[1
,4
]}

机构：

[1] Ruhr Univ Bochum, Chair Appl Electrodynam & Plasma Technol, Univ Str 150, D-44801 Bochum, Germany

[2] Ruhr Univ Bochum, Inst Theoret Elect Engn, Univ Str 150, D-44801 Bochum, Germany

[3] Ruhr Univ Bochum, Inst Automat & Comp Control, Univ Str 150, D-44801 Bochum, Germany

[4] Dalian Univ Technol, Sch Phys, Key Lab Mat Modificat Laser Ion & Electron Beams, Minist Educ, Dalian 116024, Peoples R China

来源：

PLASMA SOURCES SCIENCE & TECHNOLOGY | 2023年 / 32卷 / 04期

关键词：

magnetic asymmetry effect; non-linear electron resonance heating; DC self-bias voltage; magnetized plasma; capacitively coupled RF discharge; ADAPTIVE PARTICLE MANAGEMENT; MONTE-CARLO COLLISIONS; CIRCUIT SOLUTION; FILM DEPOSITION; DISCHARGES; ENERGY; MODEL; DRIVEN; ARGON;

D O I：

10.1088/1361-6595/acc480

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

In magnetized capacitively coupled radio-frequency (RF) discharges operated at low pressure the influence of the magnetic flux density on discharge properties has been studied recently both by experimental investigations and in simulations. It was found that the magnetic asymmetry effect allows for a control of the DC self-bias and the ion energy distribution by tuning the magnetic field strength. In this study, we focus on experimental investigations of the electron power absorption dynamics in the presence of a magnetron-like magnetic field configuration in a low pressure capacitive RF discharge operated in argon. Phase resolved optical emission spectroscopy measurements provide insights into the electron dynamics on a nanosecond-timescale. The magnetic flux density and the neutral gas pressure are found to strongly alter these dynamics. For specific conditions energetic electrons are efficiently trapped by the magnetic field in a region close to the powered electrode, serving as the target surface. Depending on the magnetic field strength an electric field reversal is observed that leads to a further acceleration of electrons during the sheath collapse. These findings are supported by two-dimensional particle in cell simulations that yield deeper insights into the discharge dynamics.

引用

页数：13

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