Al0.18Ga0.82N/GaN Two-Dimensional Electron Gas-Based Ultraviolet Photodetectors With Symmetrical Interdigitated Structure

被引:8
作者
Gu, Yan [1 ,2 ]
Xie, Feng [3 ]
Fan, Qigao [4 ]
Jiang, Xuecheng [2 ]
Guo, Jiarui [2 ]
Xie, Zhijian [5 ]
Zhang, Qi [5 ]
Zhang, Xiumei [2 ]
Chen, Guoqing [2 ]
Yang, Guofeng [2 ]
机构
[1] Jiangnan Univ, Jiangsu Prov Res Ctr Light Ind Optoelect Engn & Te, Sch Internet Things Engn, Wuxi 214122, Peoples R China
[2] Jiangnan Univ, Jiangsu Prov Res Ctr Light Ind Optoelect Engn & Te, Sch Sci, Wuxi 214122, Peoples R China
[3] Anhui Univ, Informat Mat & Intelligent Sensing Lab Anhui Prov, Hefei 230039, Peoples R China
[4] Jiangnan Univ, Sch Internet Things Engn, Wuxi 214122, Peoples R China
[5] Jiangsu Xinguanglian Technol Co Ltd, Wuxi 214192, Peoples R China
基金
中国国家自然科学基金;
关键词
AlGaN/GaN; gain mechanism; interdigitated structure; transport model; ultraviolet (UV)photodetectors (PDs); HIGH RESPONSIVITY;
D O I
10.1109/TED.2022.3221356
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
fabrication and comprehensive characterizations of Al0.18Ga0.82N/GaN two-dimensional electron gas (2DEG)-based ultraviolet (UV) photodetector (PD) with symmetrical interdigitated structure are reported. The results reveal a good performance for the device with a responsivity of 800 A/W at 10 V corresponding to a high external quantum efficiency (EQE) of 3.33 x 10(5)% and a dark current of 3 x 10(-8) A at -8 V. Nevertheless, the rise time of 25 ms and the fall time of 21 ms are obtained by improving the transient response characteristic. Moreover, the fabricated 2DEG-based UV PD exhibits a broadband nature with response spectrum from 300 to 360 nm and a cutoff wavelength of 365 nm in agreement with the GaN bandgap. In addition, the performances of our devices are also optimized by varying the width and spacing of the interdigitated 2DEG structure. Furthermore, several physical models have been applied to convincingly explain the gain mechanism and high-temperature dark current transport mechanism of the proposed devices. This investigation paves the way for further improving the device detection capabilities.
引用
收藏
页码:140 / 146
页数:7
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