[1] Shanghai Jiao Tong Univ, Sch Mech Engn, State Key Lab Mech Syst & Vibrat, Shanghai 200240, Peoples R China
[2] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Funct Mat Informat, 865 Changning Rd, Shanghai 200050, Peoples R China
[3] Shanghai Jiao Tong Univ, Sch Chem & Chem Engn, State Key Lab Met Matrix Composite Mat, Shanghai 200240, Peoples R China
[4] Ningbo Univ, Dept Microelect Sci & Engn, Ningbo 315211, Peoples R China
[5] Univ Calif Berkeley, Berkeley Sensor & Actuator Ctr, Berkeley, CA 94720 USA
[6] Shanghai Jiao Tong Univ, SJTU Paris Elite Inst Technol, Shanghai 200240, Peoples R China