Design and fabrication of a lightweight 3D first surface mirror aluminized by DC magnetron sputtering

被引：0

作者：

Bautista-Hernandez, A. M. ^{[1
,2
]}

Villalobos-Mendoza, B. ^{[3
]}

Izazaga-Perez, R. ^{[4
]}

Solis-Pomar, F. ^{[1
]}

Gutierrez-Lazos, C. D. ^{[1
]}

Aviles-Alvarado, A. ^{[1
]}

Garcia-Castillo, F. A. ^{[1
]}

Perez-Tijerina, E. G. ^{[1
]}

Aguirre-Aguirre, D. ^{[2
,5
]}

机构：

[1] Univ Autonoma Nuevo Leon, Fac Ciencias Fis Matemat, Av Univ S-N,Ciudad Univ, San Nicolas De Los Garza 66455, Nuevo Leon, Mexico

[2] Univ Nacl Autonoma Mexico, Unidad Invest & Tecnol Aplicadas, Via Innovac 410,Autopista Monterrey Aeropuerto Km, Ciudad Apodaca, Nuevo Leon, Mexico

[3] Univ Monterrey, Dept Fis & Matemat, Av Ignacio Morones Prieto 4500 Pte, San Pedro Garza Garcia 66238, Nuevo Leon, Mexico

[4] Inst Nacl Astrofis Opt & Electr, DIDT Ctr Integrac Tecnol, Luis Enrique Erro 1,Sta Maria Tonanzintla, Cholula 72840, Puebla, Mexico

[5] Univ Nacl Autonoma Mexico, Inst Ciencias Aplicadas & Tecnol, Cd Univ,Apdo Postal 70-186, Mexico City 04510, DF, Mexico

来源：

APPLIED OPTICS | 2023年 / 62卷 / 34期

关键词：

THIN-FILMS; COATINGS; STEREOLITHOGRAPHY; OPTIMIZATION; TECHNOLOGY; DEPOSITION; SCATTERING; LENSES;

D O I：

10.1364/AO.502385

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Aluminum thin films were deposited on a 3D prototype employing the direct current magnetron sputtering technique to fabricate a lightweight 3D first surface mirror. Before the aluminizing, the surface of the prototypes was evaluated with interferometry and atomic force microscope (AFM). The thin films were characterized using pro-filometry, UV-Vis spectroscopy, x-ray diffraction, AFM, x-ray photoelectron spectroscopy (XPS), and scanning electron microscopy. High adherence and homogeneous deposition of the aluminum's thin films were achieved. In addition, the purity of the material was confirmed by XPS analysis. (c) 2023 Optica Publishing Group

引用

页码：9089 / 9095

页数：7