共 50 条
[23]
Structural properties of AlN films deposited by plasma-enhanced atomic layer deposition at different growth temperatures
[J].
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE,
2012, 209 (02)
:266-271
[29]
Substrate temperature influence on the properties of GaN thin films grown by hollow-cathode plasma-assisted atomic layer deposition
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,
2016, 34 (01)