The Effects of Hemisphere Dome Orientation on the Structure of Diamond-like Carbon Film Prepared Using Ion Beam Assisted Deposition

被引：5

作者：

Shang, Peng ^{[1
,2
]}

Ma, Yuanfei ^{[1
]}

Zhang, Zhenyun ^{[1
]}

Sun, Peng ^{[2
]}

Liu, Huasong ^{[2
]}

Shi, Hongchun ^{[1
]}

Lin, Quan ^{[1
]}

Xue, Tao ^{[3
]}

Ji, Yiqin ^{[2
]}

机构：

[1] GRINM Guojing Adv Mat Co Ltd, Gen Res Inst Nonferrous Met, Beijing 100088, Peoples R China

[2] Tianjin Jinhang Tech Phys Inst, Tianjin Key Lab Opt Thin Film, Tianjin 300308, Peoples R China

[3] Tianjin Univ, Ctr Anal & Tests, Tianjin 300072, Peoples R China

来源：

MATERIALS | 2023年 / 16卷 / 05期

基金：

中国国家自然科学基金;

关键词：

hemisphere dome; diamond-like carbon; DLC film; ion beam assisted deposition; surface orientation; SUBSTRATE GEOMETRY; TRIBOLOGY; COATINGS;

D O I：

10.3390/ma16051773

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Diamond-like carbon (DLC) has attracted significant attention in the recent decades because of its unique properties and applications. Ion beam assisted deposition (IBAD) has been widely established in industry due to the advantages of easy handling and scalability. In this work, a hemisphere dome model is specially designed as a substrate. The influence of the surface orientation on the coating thickness, Raman I-D/I-G ratio, surface roughness and the stress of the DLC films are examined. The reduction in the stress in the DLC films reflects the lower energy-dependence in diamond due to the varied sp3/sp2 fraction and columnar growth pattern. The variation of the surface orientation provides an efficient means of tailoring the properties and microstructure of the DLC films.

引用

页数：9

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