Room-temperature-processed synaptic a-IGZO TFT with high-k HfLaO gate dielectric as neuromodulator

被引:0
|
作者
Huang, An [1 ]
Ma, Yuan Xiao [1 ]
Li, Jia Cheng [1 ]
Dai, De [1 ]
Yang, Hui Xia [1 ]
Liu, Zi Chun [1 ]
Zhang, De Cheng [1 ]
Yang, Han [2 ]
Huang, Yuan [1 ]
Zhang, Yi Yun [2 ]
Li, Xiao Ran [1 ]
Wang, Ye Liang [1 ]
Lai, Pui To [3 ]
机构
[1] Beijing Inst Technol, Sch Integrated Circuits & Elect, Beijing, Peoples R China
[2] Chinese Acad Sci, Inst Semicond, R&D Ctr Solid State Lighting, Beijing 100083, Peoples R China
[3] Univ Hong Kong, Dept Elect & Elect Engn, Pokfulam Rd, Hong Kong 999077, Peoples R China
基金
中国国家自然科学基金;
关键词
a-IGZO; high-k; low-threshold; synaptic TFTs; neuromodulator mimicking; THIN-FILM TRANSISTORS; ELECTRONIC-STRUCTURE; VOLTAGE; PERFORMANCE; MEMRISTORS; TRANSPORT; DEFECTS;
D O I
10.1088/1361-6641/acf784
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this work, room-temperature-processed amorphous InGaZnO (a-IGZO) thin-film transistors (TFTs) have been fabricated with high-k HfLaO as gate dielectric for synaptic devices. By raising the indium content in the a-IGZO film via co-sputtering and treating the HfLaO gate dielectric in an Ar plasma, the TFT with In1.0Ga3.0Zn0.4O2.1 presents excellent electrical characteristics: a high intrinsic carrier mobility of 45.8 cm(2) V-1<middle dot>s(-1), a small threshold voltage of 1.93 V, a small hysteresis of -0.015 V, and a small subthreshold swing (SS) of 0.21 V dec(-1). Although the oxygen vacancies in the In1.0Ga3.0Zn0.4O2.1 TFT are increased to produce a high carrier mobility, memristive behaviors are hardly observed under zero gate bias due to their occupied states. Various conductance modulations and synaptic plasticities are achieved under a 2-V drain spiking voltage and a small gate bias of 1 V due to migration of oxygen ions and emptying/detrapping of oxygen vacancies in the In1.0Ga3.0Zn0.4O2.1 film, resulting in a concurrent emulation of neurotransmitter and neuromodulator through exploiting the native three-terminal structure of the TFT.
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页数:8
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