Ultralow-Power Piezo-Optomechanically Tuning on CMOS-Compatible Integrated Silicon-Hafnium-Oxide Platform

被引：10

作者：

Shen, Jian ^{[1
]}

Fan, Yuyan ^{[2
,3
]}

Xu, Zihan ^{[1
]}

Wu, Liying ^{[4
]}

Wang, Ying ^{[4
]}

Li, Xiuyan ^{[2
]}

Gan, Xuetao ^{[5
,6
]}

Zhang, Yong ^{[1
]}

Su, Yikai ^{[1
]}

机构：

[1] Shanghai Jiao Tong Univ, Dept Elect Engn, State Key Lab Adv Opt Commun Syst & Networks, Shanghai 200240, Peoples R China

[2] Shanghai Jiao Tong Univ, Natl Key Lab Sci & Technol Micro Nano Fabricat, Shanghai 200240, Peoples R China

[3] Shanghai Jiao Tong Univ, Dept Micro Nano Elect, Shanghai 200240, Peoples R China

[4] Shanghai Jiao Tong Univ, Ctr Adv Elect Mat & Devices, Shanghai 200240, Peoples R China

[5] Northwestern Polytech Univ, Sch Phys Sci & Technol, Key Lab Light Field Manipulat & Informat Acquisit, Minist Ind & Informat Technol, Xian 710129, Peoples R China

[6] Northwestern Polytech Univ, Sch Phys Sci & Technol, Shaanxi Key Lab Opt Informat Technol, Xian 710129, Peoples R China

来源：

LASER & PHOTONICS REVIEWS | 2023年 / 17卷 / 02期

基金：

中国国家自然科学基金;

关键词：

integrated optics; piezo-optomechanically; silicon-hafnium-oxide; ultralow-power; WAVE-GUIDE; GRAPHENE;

D O I：

10.1002/lpor.202200248

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Power consumption of photonic integrated circuits becomes a critical consideration. A new platform is proposed for ultralow-power tuning in silicon photonics via piezo-optomechanical coupling using hafnium-oxide actuators. As an example of the potential of the platform, a tunable silicon-hafnium-oxide hybrid microring, where hafnium-oxide film acts as an active optical and piezoelectric layer, is demonstrated. The hybrid microring is capable of linear bidirectional tuning with a wavelength tuning efficiency of 8.4 pm V-1 and a power efficiency of 0.12 nW pm(-1). The estimated power consumption for tuning a free spectral range (FSR) in hybrid microring is 3.07 mu W per FSR. The hybrid silicon-hafnium-oxide technology with complementary metal-oxide-semiconductor (CMOS) compatibility advances the field of ultralow-power integrated photonic devices and can find applications in optical communications, computing, and spaces under cryogenic temperatures.

引用

页数：10

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