Eco-friendly smart design strategy for integrated semiconductor processes

The trend of fast speed, increasing complexity, and rising costs in technological development has posed unprecedented challenges to semiconductor designers and manufacturers. Meanwhile, reducing ecological impact has been an emerging trend in the manufacturing sector, as embodied by the movement of zero emission. Therefore, the study puts forth a smart and sustainable technology for the design of semiconductor processes, introducing a resource-to-demand allocation method. In this method, manufacturing technologies are regarded as resources and product requirements are treated as demands. Furthermore, process integration is employed to enhance resource utilization and develop sustainable strategies for the manufacturing processes. By optimizing resource allocation for demands, an efficient fabrication sequence is achieved, leading to a reduction in resource consumption. The results demonstrate that integrated semiconductor processes significantly improve production efficiency, thereby realizing green processes and green products.