Influence of substrate temperature on the properties of ZnTe:Cu films prepared by a magnetron co-sputtering method

被引：5

作者：

Hongwei Li ^{[1
]}

Haofei Huang ^{[1
]}

Azhati Lina ^{[1
]}

Ke Tang ^{[1
,2
]}

Zhuorui Chen ^{[1
,3
]}

Zilong Zhang ^{[3
]}

Ke Xu ^{[1
]}

Keke Ding ^{[1
]}

Linjun Wang ^{[1
,2
,4
]}

Jian Huang ^{[1
,2
,4
]}

机构：

[1] Shanghai Univ, Sch Mat Sci & Engn, Shanghai 200444, Peoples R China

[2] SHU, Zhejiang Inst Adv Mat, Jiashan 314113, Peoples R China

[3] Natl Inst Mat Sci NIMS, Res Ctr Funct Mat, Namiki 1-1, Tsukuba, Ibaraki 3050044, Japan

[4] Shanghai Collaborat Innovat Ctr Intelligent Sensi, Shanghai, Peoples R China

来源：

HELIYON | 2024年 / 10卷 / 01期

基金：

中国国家自然科学基金;

关键词：

ZnTe:Cu film; Magnetron co-sputtering; Substrate temperature; Electrical properties; CU-DOPED ZNTE; THIN-FILMS; ELECTRICAL-PROPERTIES; GROWTH; CONTACT; CDTE; DEPENDENCE; IMMERSION; LAYERS;

D O I：

10.1016/j.heliyon.2023.e23349

中图分类号：

O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

Copper-doped Zinc Tellurium (ZnTe:Cu) films were deposited on borosilicate glass using magnetron co-sputtering technique. The influence of the substrate temperature on the structural, morphological, optical and electrical properties of ZnTe:Cu films was investigated by X-ray diffraction (XRD), Raman spectroscopy, X-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM), UV-Vis spectrophotometer and Hall effect measurement system. The results indicate that substrate temperature significantly affects the properties of the ZnTe:Cu films. When the substrate temperature increases from room temperature to 600 degrees C, the (111)-preferred orientation of ZnTe:Cu films is gradually replaced by the (220)-preferred orientation. At high substrate temperatures (>= 500 degrees C), the CuxTe phase appears in the ZnTe:Cu films, resulting in higher carrier concentration (>10(19) cm(-3)) and lower resistivity (<10(-2) Omega cm) of the prepared films.

引用

页数：10

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[31] Effect of elevated substrate temperature on growth, properties, and structure of indium tin oxide films prepared by reactive magnetron sputtering [J].

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