Influence of substrate temperature on the properties of ZnTe:Cu films prepared by a magnetron co-sputtering method

被引：5

作者：

Hongwei Li ^{[1
]}

Haofei Huang ^{[1
]}

Azhati Lina ^{[1
]}

Ke Tang ^{[1
,2
]}

Zhuorui Chen ^{[1
,3
]}

Zilong Zhang ^{[3
]}

Ke Xu ^{[1
]}

Keke Ding ^{[1
]}

Linjun Wang ^{[1
,2
,4
]}

Jian Huang ^{[1
,2
,4
]}

机构：

[1] Shanghai Univ, Sch Mat Sci & Engn, Shanghai 200444, Peoples R China

[2] SHU, Zhejiang Inst Adv Mat, Jiashan 314113, Peoples R China

[3] Natl Inst Mat Sci NIMS, Res Ctr Funct Mat, Namiki 1-1, Tsukuba, Ibaraki 3050044, Japan

[4] Shanghai Collaborat Innovat Ctr Intelligent Sensi, Shanghai, Peoples R China

来源：

HELIYON | 2024年 / 10卷 / 01期

基金：

中国国家自然科学基金;

关键词：

ZnTe:Cu film; Magnetron co-sputtering; Substrate temperature; Electrical properties; CU-DOPED ZNTE; THIN-FILMS; ELECTRICAL-PROPERTIES; GROWTH; CONTACT; CDTE; DEPENDENCE; IMMERSION; LAYERS;

D O I：

10.1016/j.heliyon.2023.e23349

中图分类号：

O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

Copper-doped Zinc Tellurium (ZnTe:Cu) films were deposited on borosilicate glass using magnetron co-sputtering technique. The influence of the substrate temperature on the structural, morphological, optical and electrical properties of ZnTe:Cu films was investigated by X-ray diffraction (XRD), Raman spectroscopy, X-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM), UV-Vis spectrophotometer and Hall effect measurement system. The results indicate that substrate temperature significantly affects the properties of the ZnTe:Cu films. When the substrate temperature increases from room temperature to 600 degrees C, the (111)-preferred orientation of ZnTe:Cu films is gradually replaced by the (220)-preferred orientation. At high substrate temperatures (>= 500 degrees C), the CuxTe phase appears in the ZnTe:Cu films, resulting in higher carrier concentration (>10(19) cm(-3)) and lower resistivity (<10(-2) Omega cm) of the prepared films.

引用

页数：10

共 50 条

[21] Influence of Substrate Temperature on the Properties of Titanium Indium Zinc Oxide Films Prepared by RF Magnetron Sputtering
Kim, Eun Mi
Oh, Byeong-Yun
Oh, Jeung Pyo
Heo, Gi-Seok
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2017, 17 (05) : 3509 - 3513
[22] The surface topography, structural and mechanical properties of Ge1-xCx films prepared by magnetron co-sputtering
Jiang, Chunzhu
Zhu, Jiaqi
Han, Jiecai
Cao, Wenxin
JOURNAL OF NON-CRYSTALLINE SOLIDS, 2014, 383 : 126 - 130
[23] Optical and electrical properties of FeSi2 films prepared by DC magnetron co-sputtering
Zhang, D-P.
Zhu, M-D.
Li, Y.
Lin, Q-Y.
Cai, X-M.
Ye, F.
Liang, G-X.
Zheng, Z-H.
Luo, J-T.
Fan, P.
INTERNATIONAL JOURNAL OF NANOTECHNOLOGY, 2015, 12 (10-12) : 761 - 768
[24] Microstructures, electrical and magnetic properties of (Ga, Co)-ZnO films by radio frequency magnetron co-sputtering
Chen, Sheng-Chi
Wang, Chung-Hsien
Sun, Hui
Wen, Chao-Kuang
Lu, Chao-Feng
Tsai, Chia -Lung
Fu, Yi-Keng
Chuang, Tung-Han
SURFACE & COATINGS TECHNOLOGY, 2016, 303 : 203 - 208
[25] Effect of Silver Dopants on the ZnO Thin Films Prepared by a Radio Frequency Magnetron Co-Sputtering System
Liu, Fang-Cheng
Li, Jyun-Yong
Chen, Tai-Hong
Chang, Chun-How
Lee, Ching-Ting
Hsiao, Wei-Hua
Liu, Day-Shan
MATERIALS, 2017, 10 (07):
[26] Synthesis and Optical Properties of Different Bismuth Niobate Films Grown by Dual Magnetron Co-Sputtering
Depablos-Rivera, Osmary
Zeinert, Andreas
Rodil, Sandra E.
ADVANCED ENGINEERING MATERIALS, 2018, 20 (10)
[27] Property comparison of CuInSi films prepared by multilayer synthesized and magnetron co-sputtering
Xie, Jiansheng
Li, Jinhua
Luan, Ping
MECHANICAL AND AEROSPACE ENGINEERING, PTS 1-7, 2012, 110-116 : 3755 - 3761
[28] Effect of substrate temperature on properties of CuInSe2 thin films deposited by magnetron sputtering
Yan, Zhi
Ji, Xin
Li, Ming
Mi, Yiming
APPLICATIONS OF ENGINEERING MATERIALS, PTS 1-4, 2011, 287-290 : 2131 - +
[29] Effect of substrate temperature on the properties of copper nitride thin films deposited by reactive magnetron sputtering
Cho, Shinho
CURRENT APPLIED PHYSICS, 2012, 12 : S44 - S47
[30] Influence of substrate temperature on the energy storage properties of bismuth magnesian niobium thin films prepared by magnetron sputtering
Wu, Muying
Yu, Shihui
Wang, Xiaohu
Li, Lingxia
CERAMICS INTERNATIONAL, 2021, 47 (06) : 8265 - 8270

← 1 2 3 4 5 →