Degradation Due to Photo-Induced Electron in Top-Gate In-Ga-Zn-O Thin Film Transistors With n- Region Under Negative Bias Stress and Light Irradiation

We investigated the positive threshold voltage (Vth) shift with hump and on-current (Ion) reduction in top-gate In-Ga-Zn-O (IGZO) thin film transistors (TFTs) after negative gate bias of -20 V at 60?C and light irradiation stress (NBTIS). This degradation can be classified into three types of mechanism. 1. The hump at low gate voltage (Vg) is a sub-transistor effect caused by hole trapping at the IGZO/top gate insulator (TGI) interface. 2. The positive shift of Vth is caused by the trapped photo-induced electrons at the IGZO/bottom gate insulator (BGI) interface. 3. The Ion reduction occurred due to trapped photo-induced electrons at interface between n- region of IGZO/BGI interface. The electric field induced by trapped electron promotes depletion of the channel region at the IGZO/BGI and IGZO/TGI interface and n- region of IGZO/BGI interface, which corresponds to a drop in effective gate and drain voltage, respectively. Thus, the positive Vth shift and Ion reduction occurred due to trapping of photo-induced electron under NBTIS. Based on our proposed mechanism, this degradation was suppressed by the dual-gate structure.