Effect of substrate bias voltage on structural and tribological properties of W-Ti-C-N thin films produced by combinational HiPIMS and DCMS co-sputtering

被引：10
作者：
Ataie, S. A. [1 ]
Soltanieh, M. [1 ]
Naghizadeh, R. [1 ]
Cavaleiro, A. [2 ,3 ]
Evaristo, M. [2 ]
Fernandes, F. [2 ]
Ferreira, F. [2 ,3 ]
机构：
[1] Iran Univ Sci & Technol, Sch Met & Mat Engn, Tehran 1684613114, Iran
[2] Univ Coimbra, CEMMPRE Ctr Mech Engn Mat & Proc, Dept Mech Engn, Rua Luis Reis Santos, P-3030788 Coimbra, Portugal
[3] LED &Mat IPN, Inst Pedro Nunes, Lab Ensaios Desgaste & Mat, Rua Pedro Nunes, P-3030199 Coimbra, Portugal
来源：
WEAR | 2023年 / 520卷
关键词：
PVD coatings; Surface topography; Indentation; Wear testing; Cutting tools; FRACTURE-TOUGHNESS; MECHANICAL-PROPERTIES; COATINGS; POWER; TEMPERATURE; DEPOSITION; MICROSTRUCTURE; STRENGTH; BEHAVIOR; HARDNESS;
D O I：
10.1016/j.wear.2023.204654
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
Protective multi-component thin films at the surface of cutting tools have been significantly developed to reduce wear and friction. The present work investigates the effect of substrate bias voltage on the structural-tribological relations of W-Ti-C-N thin films produced by HiPIMS and DCMS co-sputtering. Chemical analysis of the coatings is obtained and composite phase structure is revealed. Morphology of the coatings illustrates that defectless surfaces may be achieved. Topographical parameters are investigated by employing graphical software. Inden-tation, scratch and pin-on-disk tests (pin is AISI 52100 steel) are applied to study mechanical behaviors of the films. To produce a wear-resistant film, a median bias voltage (-60 V) and as a result, optimum content of tungsten concentration (19.2 at. %), grain size (42.8 nm) and average peak interval (188 nm) is required. Finally, a model based on the representative volume element is developed to show crack propagation and delamination.
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页数：17
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