Uncovering the Role of Crystal Phase in Determining Nonvolatile Flash Memory Device Performance Fabricated from MoTe2-Based 2D van der Waals Heterostructures

被引:6
作者
Xia, Yunpeng [1 ]
Zha, Jiajia [2 ]
Huang, Haoxin [1 ]
Wang, Huide [1 ,2 ]
Yang, Peng [3 ]
Zheng, Long [4 ]
Zhang, Zhuomin [5 ]
Yang, Zhengbao [5 ,6 ]
Chen, Ye [4 ]
Chan, Hau Ping [1 ]
Ho, Johnny C. C. [2 ]
Tan, Chaoliang [1 ,7 ,8 ,9 ]
机构
[1] City Univ Hong Kong, Dept Elect Engn, Kowloon, Hong Kong 999077, Peoples R China
[2] City Univ Hong Kong, Dept Mat Sci & Engn, Kowloon, Hong Kong 999077, Peoples R China
[3] Shenzhen Technol Univ, Coll Integrated Circuits & Optoelect Chips, Shenzhen 518118, Peoples R China
[4] Chinese Univ Hong Kong, Dept Chem, Shatin, Hong Kong 999077, Peoples R China
[5] City Univ Hong Kong, Dept Mech Engn, Kowloon, Hong Kong 999077, Peoples R China
[6] Hong Kong Univ Sci & Technol, Dept Mech & Aerosp Engn, Kowloon, Hong Kong 999077, Peoples R China
[7] City Univ Hong Kong, Dept Chem, Kowloon, Hong Kong 999077, Peoples R China
[8] City Univ Hong Kong, Ctr Super Diamond & Adv Films COSDAF, Kowloon, Hong Kong 999077, Peoples R China
[9] Univ Hong Kong, Dept Elect & Elect Engn, Pokfulam, Hong Kong 999077, Peoples R China
基金
中国国家自然科学基金;
关键词
crystal phase; MoTe2; nanosheets; 2D van der Waals heterostructures; flash memory devices; floating gate; MOS2; MOTE2; 1T';
D O I
10.1021/acsami.3c06316
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Although the crystal phase of two-dimensional (2D) transitionmetaldichalcogenides (TMDs) has been proven to play an essential role infabricating high-performance electronic devices in the past decade,its effect on the performance of 2D material-based flash memory devicesstill remains unclear. Here, we report the exploration of the effectof MoTe2 in different phases as the charge-trapping layeron the performance of 2D van der Waals (vdW) heterostructure-basedflash memory devices, where a metallic 1T & PRIME;-MoTe2 or semiconducting 2H-MoTe2 nanoflake is used as the floatinggate. By conducting comprehensive measurements on the two kinds ofvdW heterostructure-based devices, the memory device based on MoS2/h-BN/1T & PRIME;-MoTe2 presents much better performance,including a larger memory window, faster switching speed (100 ns),and higher extinction ratio (10(7)), than that of the devicebased on the MoS2/h-BN/2H-MoTe2 heterostructure.Moreover, the device based on the MoS2/h-BN/1T & PRIME;-MoTe2 heterostructure also shows a long cycle (>1200 cycles)andretention (>3000 s) stability. Our study clearly demonstrates thatthe crystal phase of 2D TMDs has a significant impact on the performanceof nonvolatile flash memory devices based on 2D vdW heterostructures,which paves the way for the fabrication of future high-performancememory devices based on 2D materials.
引用
收藏
页码:35196 / 35205
页数:10
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