Uncovering the Role of Crystal Phase in Determining Nonvolatile Flash Memory Device Performance Fabricated from MoTe2-Based 2D van der Waals Heterostructures

被引:6
作者
Xia, Yunpeng [1 ]
Zha, Jiajia [2 ]
Huang, Haoxin [1 ]
Wang, Huide [1 ,2 ]
Yang, Peng [3 ]
Zheng, Long [4 ]
Zhang, Zhuomin [5 ]
Yang, Zhengbao [5 ,6 ]
Chen, Ye [4 ]
Chan, Hau Ping [1 ]
Ho, Johnny C. C. [2 ]
Tan, Chaoliang [1 ,7 ,8 ,9 ]
机构
[1] City Univ Hong Kong, Dept Elect Engn, Kowloon, Hong Kong 999077, Peoples R China
[2] City Univ Hong Kong, Dept Mat Sci & Engn, Kowloon, Hong Kong 999077, Peoples R China
[3] Shenzhen Technol Univ, Coll Integrated Circuits & Optoelect Chips, Shenzhen 518118, Peoples R China
[4] Chinese Univ Hong Kong, Dept Chem, Shatin, Hong Kong 999077, Peoples R China
[5] City Univ Hong Kong, Dept Mech Engn, Kowloon, Hong Kong 999077, Peoples R China
[6] Hong Kong Univ Sci & Technol, Dept Mech & Aerosp Engn, Kowloon, Hong Kong 999077, Peoples R China
[7] City Univ Hong Kong, Dept Chem, Kowloon, Hong Kong 999077, Peoples R China
[8] City Univ Hong Kong, Ctr Super Diamond & Adv Films COSDAF, Kowloon, Hong Kong 999077, Peoples R China
[9] Univ Hong Kong, Dept Elect & Elect Engn, Pokfulam, Hong Kong 999077, Peoples R China
基金
中国国家自然科学基金;
关键词
crystal phase; MoTe2; nanosheets; 2D van der Waals heterostructures; flash memory devices; floating gate; MOS2; MOTE2; 1T';
D O I
10.1021/acsami.3c06316
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Although the crystal phase of two-dimensional (2D) transitionmetaldichalcogenides (TMDs) has been proven to play an essential role infabricating high-performance electronic devices in the past decade,its effect on the performance of 2D material-based flash memory devicesstill remains unclear. Here, we report the exploration of the effectof MoTe2 in different phases as the charge-trapping layeron the performance of 2D van der Waals (vdW) heterostructure-basedflash memory devices, where a metallic 1T & PRIME;-MoTe2 or semiconducting 2H-MoTe2 nanoflake is used as the floatinggate. By conducting comprehensive measurements on the two kinds ofvdW heterostructure-based devices, the memory device based on MoS2/h-BN/1T & PRIME;-MoTe2 presents much better performance,including a larger memory window, faster switching speed (100 ns),and higher extinction ratio (10(7)), than that of the devicebased on the MoS2/h-BN/2H-MoTe2 heterostructure.Moreover, the device based on the MoS2/h-BN/1T & PRIME;-MoTe2 heterostructure also shows a long cycle (>1200 cycles)andretention (>3000 s) stability. Our study clearly demonstrates thatthe crystal phase of 2D TMDs has a significant impact on the performanceof nonvolatile flash memory devices based on 2D vdW heterostructures,which paves the way for the fabrication of future high-performancememory devices based on 2D materials.
引用
收藏
页码:35196 / 35205
页数:10
相关论文
共 57 条
  • [1] Solution-Synthesized High-Mobility Tellurium Nanoflakes for Short-Wave Infrared Photodetectors
    Amani, Matin
    Tan, Chaoliang
    Zhang, George
    Zhao, Chunsong
    Bullock, James
    Song, Xiaohui
    Kim, Hyungjin
    Shrestha, Vivek Raj
    Gao, Yang
    Crozier, Kenneth B.
    Scott, Mary
    Javey, Ali
    [J]. ACS NANO, 2018, 12 (07) : 7253 - 7263
  • [2] [Anonymous], 2006, Semiconductor Material and Device Characterisation, V3rd
  • [3] Nonvolatile Memories Based on Graphene and Related 2D Materials
    Bertolazzi, Simone
    Bondavalli, Paolo
    Roche, Stephan
    San, Tamer
    Choi, Sung-Yool
    Colombo, Luigi
    Bonaccorso, Francesco
    Samori, Paolo
    [J]. ADVANCED MATERIALS, 2019, 31 (10)
  • [4] Nonvolatile Memory Cells Based on MoS2/Graphene Heterostructures
    Bertolazzi, Simone
    Krasnozhon, Daria
    Kis, Andras
    [J]. ACS NANO, 2013, 7 (04) : 3246 - 3252
  • [5] Introduction to Flash memory
    Bez, R
    Camerlenghi, E
    Modelli, A
    Visconti, A
    [J]. PROCEEDINGS OF THE IEEE, 2003, 91 (04) : 489 - 502
  • [6] Recent Advances in Two-Dimensional Materials beyond Graphene
    Bhimanapati, Ganesh R.
    Lin, Zhong
    Meunier, Vincent
    Jung, Yeonwoong
    Cha, Judy
    Das, Saptarshi
    Xiao, Di
    Son, Youngwoo
    Strano, Michael S.
    Cooper, Valentino R.
    Liang, Liangbo
    Louie, Steven G.
    Ringe, Emilie
    Zhou, Wu
    Kim, Steve S.
    Naik, Rajesh R.
    Sumpter, Bobby G.
    Terrones, Humberto
    Xia, Fengnian
    Wang, Yeliang
    Zhu, Jun
    Akinwande, Deji
    Alem, Nasim
    Schuller, Jon A.
    Schaak, Raymond E.
    Terrones, Mauricio
    Robinson, Joshua A.
    [J]. ACS NANO, 2015, 9 (12) : 11509 - 11539
  • [7] Carballo J. A., 2014, ITRS 2 0 RE FRAM SEM, P139
  • [8] Recent Progress on Two-Dimensional Materials
    Chang, Cheng
    Chen, Wei
    Chen, Ye
    Chen, Yonghua
    Chen, Yu
    Ding, Feng
    Fan, Chunhai
    Fan, Hong Jin
    Fan, Zhanxi
    Gong, Cheng
    Gong, Yongji
    He, Qiyuan
    Hong, Xun
    Hu, Sheng
    Hu, Weida
    Huang, Wei
    Huang, Yuan
    Ji, Wei
    Li, Dehui
    Li, Lain-Jong
    Li, Qiang
    Lin, Li
    Ling, Chongyi
    Liu, Minghua
    Liu, Nan
    Liu, Zhuang
    Loh, Kian Ping
    Ma, Jianmin
    Miao, Feng
    Peng, Hailin
    Shao, Mingfei
    Song, Li
    Su, Shao
    Sun, Shuo
    Tan, Chaoliang
    Tang, Zhiyong
    Wang, Dingsheng
    Wang, Huan
    Wang, Jinlan
    Wang, Xin
    Wang, Xinran
    Wee, Andrew T. S.
    Wei, Zhongming
    Wu, Yuen
    Wu, Zhong-Shuai
    Xiong, Jie
    Xiong, Qihua
    Xu, Weigao
    Yin, Peng
    Zeng, Haibo
    [J]. ACTA PHYSICO-CHIMICA SINICA, 2021, 37 (12)
  • [9] Chen Y, 2020, NAT REV CHEM, V4, P243, DOI 10.1038/s41570-020-0173-4
  • [10] Memristive Behavior and Ideal Memristor of 1T Phase MoS2 Nanosheets
    Cheng, Peifu
    Sun, Kai
    Hu, Yun Hang
    [J]. NANO LETTERS, 2016, 16 (01) : 572 - 576