First-principles calculations;
Aluminum nitride;
Piezoelectric properties;
Mechanical properties;
Bond geometry;
Band structure;
THIN-FILMS;
POLARIZATION;
TEMPERATURE;
D O I:
10.1016/j.physb.2023.415470
中图分类号:
O469 [凝聚态物理学];
学科分类号:
070205 ;
摘要:
In this report, rigorous calculations based on density functional theory have been performed to study the piezoelectric and elastic properties of wurtzite aluminum nitride (w-AlN) with single- and co-alloying by Hf (or Zr) and Sc. It is found that the (HfSc)0.375Al0.625N and (ZrSc)0.375Al0.625N with stable wurtzite phase, exhibit a piezoelectric coefficient d33 as large as 49.18 pC/N and 47.00 pC/N, respectively. However, the piezoelectric voltage constant g33 and electromechanical coupling constant k233 of HfAlN, ZrAlN, HfScAlN, and ZrScAlN are smaller than that of the ScAlN counterpart, which is due to the large dielectric constant epsilon 33 of Hf (or Zr) alloying samples. Furthermore, the internal parameter u and the bond angle alpha were calculated to elucidate the brittle-toductile transformation in alloying w-AlN crystal structure. Electronic structure calculations show that the bandgap decreases almost linearly concerning the increase of alloying concentration, and the Hf (or Zr) alloying compounds become n-type semiconductors due to the existing high-charge states.
机构:
Tsinghua Univ, Dept Mat Sci & Engn, Key Lab Adv Mat MOE, Beijing 100084, Peoples R ChinaTsinghua Univ, Dept Mat Sci & Engn, Key Lab Adv Mat MOE, Beijing 100084, Peoples R China
Liu, Hongyan
Zeng, Fei
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机构:
Tsinghua Univ, Dept Mat Sci & Engn, Key Lab Adv Mat MOE, Beijing 100084, Peoples R ChinaTsinghua Univ, Dept Mat Sci & Engn, Key Lab Adv Mat MOE, Beijing 100084, Peoples R China
Zeng, Fei
Tang, Guangsheng
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h-index: 0
机构:
Tsinghua Univ, Dept Mat Sci & Engn, Key Lab Adv Mat MOE, Beijing 100084, Peoples R ChinaTsinghua Univ, Dept Mat Sci & Engn, Key Lab Adv Mat MOE, Beijing 100084, Peoples R China
Tang, Guangsheng
Pan, Feng
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h-index: 0
机构:
Tsinghua Univ, Dept Mat Sci & Engn, Key Lab Adv Mat MOE, Beijing 100084, Peoples R ChinaTsinghua Univ, Dept Mat Sci & Engn, Key Lab Adv Mat MOE, Beijing 100084, Peoples R China
机构:
Univ Penn, Elect & Syst Engn, Philadelphia, PA 19104 USAUniv Penn, Elect & Syst Engn, Philadelphia, PA 19104 USA
Liu, Xiwen
Wang, Dixiong
论文数: 0引用数: 0
h-index: 0
机构:
Univ Penn, Elect & Syst Engn, Philadelphia, PA 19104 USAUniv Penn, Elect & Syst Engn, Philadelphia, PA 19104 USA
Wang, Dixiong
Kim, Kwan-Ho
论文数: 0引用数: 0
h-index: 0
机构:
Univ Penn, Elect & Syst Engn, Philadelphia, PA 19104 USAUniv Penn, Elect & Syst Engn, Philadelphia, PA 19104 USA
Kim, Kwan-Ho
Katti, Keshava
论文数: 0引用数: 0
h-index: 0
机构:
Univ Penn, Elect & Syst Engn, Philadelphia, PA 19104 USAUniv Penn, Elect & Syst Engn, Philadelphia, PA 19104 USA
Katti, Keshava
Zheng, Jeffrey
论文数: 0引用数: 0
h-index: 0
机构:
Univ Penn, Mat Sci & Engn, Philadelphia, PA 19104 USAUniv Penn, Elect & Syst Engn, Philadelphia, PA 19104 USA
Zheng, Jeffrey
Musavigharavi, Pariasadat
论文数: 0引用数: 0
h-index: 0
机构:
Univ Penn, Elect & Syst Engn, Philadelphia, PA 19104 USA
Univ Penn, Mat Sci & Engn, Philadelphia, PA 19104 USAUniv Penn, Elect & Syst Engn, Philadelphia, PA 19104 USA
Musavigharavi, Pariasadat
Miao, Jinshui
论文数: 0引用数: 0
h-index: 0
机构:
Univ Penn, Elect & Syst Engn, Philadelphia, PA 19104 USAUniv Penn, Elect & Syst Engn, Philadelphia, PA 19104 USA
Miao, Jinshui
Stach, Eric A.
论文数: 0引用数: 0
h-index: 0
机构:
Univ Penn, Mat Sci & Engn, Philadelphia, PA 19104 USA
Univ Penn, Lab Res Struct Matter, Philadelphia, PA 19104 USAUniv Penn, Elect & Syst Engn, Philadelphia, PA 19104 USA
Stach, Eric A.
Olsson, Roy H., III
论文数: 0引用数: 0
h-index: 0
机构:
Univ Penn, Elect & Syst Engn, Philadelphia, PA 19104 USAUniv Penn, Elect & Syst Engn, Philadelphia, PA 19104 USA
Olsson, Roy H., III
Jariwala, Deep
论文数: 0引用数: 0
h-index: 0
机构:
Univ Penn, Elect & Syst Engn, Philadelphia, PA 19104 USAUniv Penn, Elect & Syst Engn, Philadelphia, PA 19104 USA
机构:
Tsinghua Univ, Dept Mat Sci & Engn, Key Lab Adv Mat MOE, Beijing 100084, Peoples R ChinaTsinghua Univ, Dept Mat Sci & Engn, Key Lab Adv Mat MOE, Beijing 100084, Peoples R China
Liu, Hongyan
Zeng, Fei
论文数: 0引用数: 0
h-index: 0
机构:
Tsinghua Univ, Dept Mat Sci & Engn, Key Lab Adv Mat MOE, Beijing 100084, Peoples R ChinaTsinghua Univ, Dept Mat Sci & Engn, Key Lab Adv Mat MOE, Beijing 100084, Peoples R China
Zeng, Fei
Tang, Guangsheng
论文数: 0引用数: 0
h-index: 0
机构:
Tsinghua Univ, Dept Mat Sci & Engn, Key Lab Adv Mat MOE, Beijing 100084, Peoples R ChinaTsinghua Univ, Dept Mat Sci & Engn, Key Lab Adv Mat MOE, Beijing 100084, Peoples R China
Tang, Guangsheng
Pan, Feng
论文数: 0引用数: 0
h-index: 0
机构:
Tsinghua Univ, Dept Mat Sci & Engn, Key Lab Adv Mat MOE, Beijing 100084, Peoples R ChinaTsinghua Univ, Dept Mat Sci & Engn, Key Lab Adv Mat MOE, Beijing 100084, Peoples R China
机构:
Univ Penn, Elect & Syst Engn, Philadelphia, PA 19104 USAUniv Penn, Elect & Syst Engn, Philadelphia, PA 19104 USA
Liu, Xiwen
Wang, Dixiong
论文数: 0引用数: 0
h-index: 0
机构:
Univ Penn, Elect & Syst Engn, Philadelphia, PA 19104 USAUniv Penn, Elect & Syst Engn, Philadelphia, PA 19104 USA
Wang, Dixiong
Kim, Kwan-Ho
论文数: 0引用数: 0
h-index: 0
机构:
Univ Penn, Elect & Syst Engn, Philadelphia, PA 19104 USAUniv Penn, Elect & Syst Engn, Philadelphia, PA 19104 USA
Kim, Kwan-Ho
Katti, Keshava
论文数: 0引用数: 0
h-index: 0
机构:
Univ Penn, Elect & Syst Engn, Philadelphia, PA 19104 USAUniv Penn, Elect & Syst Engn, Philadelphia, PA 19104 USA
Katti, Keshava
Zheng, Jeffrey
论文数: 0引用数: 0
h-index: 0
机构:
Univ Penn, Mat Sci & Engn, Philadelphia, PA 19104 USAUniv Penn, Elect & Syst Engn, Philadelphia, PA 19104 USA
Zheng, Jeffrey
Musavigharavi, Pariasadat
论文数: 0引用数: 0
h-index: 0
机构:
Univ Penn, Elect & Syst Engn, Philadelphia, PA 19104 USA
Univ Penn, Mat Sci & Engn, Philadelphia, PA 19104 USAUniv Penn, Elect & Syst Engn, Philadelphia, PA 19104 USA
Musavigharavi, Pariasadat
Miao, Jinshui
论文数: 0引用数: 0
h-index: 0
机构:
Univ Penn, Elect & Syst Engn, Philadelphia, PA 19104 USAUniv Penn, Elect & Syst Engn, Philadelphia, PA 19104 USA
Miao, Jinshui
Stach, Eric A.
论文数: 0引用数: 0
h-index: 0
机构:
Univ Penn, Mat Sci & Engn, Philadelphia, PA 19104 USA
Univ Penn, Lab Res Struct Matter, Philadelphia, PA 19104 USAUniv Penn, Elect & Syst Engn, Philadelphia, PA 19104 USA
Stach, Eric A.
Olsson, Roy H., III
论文数: 0引用数: 0
h-index: 0
机构:
Univ Penn, Elect & Syst Engn, Philadelphia, PA 19104 USAUniv Penn, Elect & Syst Engn, Philadelphia, PA 19104 USA
Olsson, Roy H., III
Jariwala, Deep
论文数: 0引用数: 0
h-index: 0
机构:
Univ Penn, Elect & Syst Engn, Philadelphia, PA 19104 USAUniv Penn, Elect & Syst Engn, Philadelphia, PA 19104 USA