Unlocking performance potential of two-dimensional SnS2 transistors with solution-processed high-k Y:HfO2 film and semimetal bismuth contact

被引:3
作者
Song, Chong-Myeong [1 ]
Kim, Dongsu [1 ]
Lim, Hyeongtae [1 ,2 ]
Kang, Hongki [1 ]
Jang, Jae Eun [1 ]
Kwon, Hyuk- Jun [1 ,2 ]
机构
[1] Daegu Gyeongbuk Inst Sci & Technol DGIST, Dept Elect Engn & Comp Sci, Daegu 42988, South Korea
[2] DGIST, Convergence Res Adv Ctr Olfact, Daegu 42988, South Korea
基金
新加坡国家研究基金会;
关键词
Tin disulfide (SnS2 ); Field-effect transistor; Bismuth (Bi); Fermi level pinning; Schottky barrier; Yttrium-doped hafnium dioxide (Y:HfO2); INVERSION LAYER MOBILITY; FIELD-EFFECT TRANSISTORS; MONOLAYER SNS2; SI MOSFETS; MOS2; THIN; UNIVERSALITY; RESISTANCE;
D O I
10.1016/j.apsusc.2023.156577
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Two-dimensional (2D) tin disulfide (SnS2) is emerging as a viable channel material for high-performance fieldeffect transistors (FET) with high intrinsic mobility. To implement a high-performance two-dimensional SnS2 FET, high field-effect mobility (mu FE), steep subthreshold swing (SS), high on-current value (Ion), and high on/off ratio (I-on/I-off) must be realized. To improve these parameters, we first fabricated a high-k (similar to 30.5) yttrium-doped hafnium dioxide (Y:HfO2) film through a solution process to suppress Coulomb electron scattering, and to enhance the semiconductor-dielectric interface with an efficient metal-oxygen framework and a very smooth (root mean square = 0.29 nm) surface. Second, we induced Fermi level depinning by introducing a semimetal bismuth (Bi) contact with a low density of states (DOS) at the Fermi level to suppress the metal-induced gap state (MIGS). Through these two strategies, the SnS2 FET obtained high mu FE (60.5 cm(2)V(-1)s(-1)), the SS theoretical limit of 60 mV/dec, negligible Schottky barrier height, high normalized on-current (IonL/W) of 90.6 mu A, and high I-on/ I-off of 3 x 10(7), demonstrating that SnS2 can be re-evaluated as a potentially effective 2D channel material.
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页数:8
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