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Singapore Inst Mfg Technol, Surface Technol Grp, Singapore 638075, Singapore
Comenius Univ, Fac Math Phys & Informat, Dept Expt Phys, Bratislava 84248, Slovakia
Masaryk Univ, R&D Ctr Low Cost Plasma & Nanotechnol Surface Mod, CS-61137 Brno, Czech Republic Singapore Inst Mfg Technol, Surface Technol Grp, Singapore 638075, Singapore