Pressure Sensor Based on Optical Resonator in a Compact Plasmonic System

Optical pressure sensors have the advantage of being impervious to electromagnetic interference. However, it remains difficult to explore the quantitative relationship between the optical response and the exerted applied pressure. Here, for the first time, the quantitative relationship between the deformation of optical resonator and the applied pressure and the optical response characteristics of the structure are investigated in detail by finite element method, and an ultracompact optical pressure sensor with a high sensitivity similar to 10.2 nm/MPa is demonstrated. Simulation results show that the maximum deformation of the optical resonator is linearly related to the applied pressure and has a limit value at a fixed input pressure as the range of pressure applied increases. The results also imply that the external force can induce a redshift in the resonance wavelength in addition to generating intriguing phenomena like Fano resonance. These observations contribute to the enhancement and diversification of the optical response within the system. The special features of our suggested structure are applicable in optical property change detection under different pressures, chemical high-pressure experimental measurement, and study of chemical reaction kinetics process.