Electret MEMS Vibration Energy Harvester with Reconfigurable Frequency Response

被引：1

作者：

Hashiguchi, Gen ^{[1
]}

Toshiyoshi, Hiroshi ^{[2
]}

机构：

[1] Shizuoka Univ, Dept Mech Engn, 3-5-1 Johoku,Naka Ku, Hamamatsu, Shizuoka 4328011, Japan

[2] Univ Tokyo, Inst Ind Sci, 4-6-1 Komaba,Meguro Ku, Tokyo 1538505, Japan

来源：

SENSORS AND MATERIALS | 2023年 / 35卷 / 06期

关键词：

MEMS; vibrational energy harvester; electret; wide bandwidth; reconfigurable frequency response; OPTIMIZATION;

D O I：

10.18494/SAM4367

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We demonstrate a microelectromechanical systems (MEMS) electret-type vibrational energy harvester with a wide bandwidth between 25 and 60 Hz (span of 35 Hz) for a small sinusoidal acceleration of less than 10 mG (G = 9.8 m/s(2)). We have developed a method of tailoring the nonlinear characteristics by adjusting the mutual position of the opposing electrodes. Both soft-and hard-spring effects are realized, thereby further extending the frequency bandwidth between 25 and 95 Hz so that power can be effectively retrieved from extremely small vibrations of 10 mG. This reconfigurable nature of the developed harvester device is suitable for autonomous distributed sensors that obtain power from environmental vibrations.

引用

页码：1957 / 1983

页数：27

共 50 条

[41] A batch-fabricated electret-biased wideband MEMS vibration energy harvester with frequency-up conversion behavior powering a UHF wireless sensor node
Lu, Y.
O'Riordan, E.
Cottone, F.
Boisseau, S.
Galayko, D.
Blokhina, E.
Marty, F.
Basset, P.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2016, 26 (12)
[42] Effect of Natural Frequency of Rotational Electret Energy Harvester for Human Walking
Miyoshi, T.
Tanaka, Y.
Suzuki, Y.
2019 19TH INTERNATIONAL CONFERENCE ON MICRO AND NANOTECHNOLOGY FOR POWER GENERATION AND ENERGY CONVERSION APPLICATIONS (POWERMEMS), 2020,
[43] Synchronized charge extraction circuit for electret-based vibration energy harvester
Liu, Guoping
He, Zhongbo
Zhou, Jingtao
Dong, Chao
Yang, Zhaoshu
ELECTRONICS LETTERS, 2023, 59 (17)
[44] ELECTRET BASED VIBRATION ENERGY HARVESTER WITH SELF-HEALABLE SURFACE CHARGE
Zhang, Yulong
Hu, Yushen
Wang, Meihua
Wang, Fei
2019 IEEE 32ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2019, : 1013 - 1016
[45] ELECTROMECHANICAL MODELING OF THE LOW FREQUENCY MEMS ENERGY HARVESTER
Karami, M. Amin
Inman, Daniel J.
PROCEEDINGS OF THE ASME INTERNATIONAL DESIGN ENGINEERING TECHNICAL CONFERENCES AND COMPUTERS AND INFORMATION IN ENGINEERING CONFERENCE, VOL 1, PTS A AND B, 2010, : 523 - 530
[46] An Electromagnetic Frequency Increased Vibration Energy Harvester
Ashraf, Khalid
Khir, Mohd Haris Md
Dennis, John Ojur
MEMS, NANO AND SMART SYSTEMS, PTS 1-6, 2012, 403-408 : 4231 - +
[47] Wireless Vibration Sensing System Powered by a Piezoelectric MEMS Vibration Energy Harvester
Takei, Ryohei
Okada, Hironao
Kobayashi, Takeshi
Noda, Daiji
Ohta, Ryo
Itoh, Toshihiro
2016 IEEE SENSORS, 2016,
[48] An Electromagnetic MEMS Energy Harvester Array with Multiple Vibration Modes
Liu, Huicong
Chen, Tao
Sun, Lining
Lee, Chengkuo
MICROMACHINES, 2015, 6 (08): : 984 - 992
[49] Sandwiched electromagnetic vibration energy harvester based on MEMS technology
Wang, Pei-Hong
Liu, Hui-Ting
Yang, Zhuo-Qing
Dai, Xu-Han
Zhao, Xiao-Lin
Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering, 2010, 8 (06): : 510 - 515
[50] A Broadband Frequency Piezoelectric Vibration Energy Harvester
Ma Hua-An
Liu Jing-Quan
Tang Gang
Yang Chun-Sheng
Li Yi-Gui
He Dan-Nong
MEMS/NEMS NANO TECHNOLOGY, 2011, 483 : 626 - +

← 1 2 3 4 5 →