Compensation for Dynamic Subdivision Error When the Grating Displacement Sensor Code Disk is Stained

被引:3
|
作者
Zhao, Changhai [1 ]
Wan, Qiuhua [1 ]
Liang, Lihui [1 ]
机构
[1] Chinese Acad Sci, Changchun Inst Opt Fine Mech & Phys, Changchun 130033, Peoples R China
基金
中国国家自然科学基金;
关键词
Sensors; Sensor phenomena and characterization; Codes; Gratings; Harmonic analysis; Error compensation; Standards; Characteristic points; error compensation; grating; stain; subdivision error;
D O I
10.1109/JSEN.2022.3232708
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
When the code disk of a displacement sensor gains dust or other impurities, its moire fringe signal will deviate from the standard range, which increases subdivision error. In this study, a high-speed A/D converter was used to collect the moire fringe signal of a sensor in real time and to extract the characteristic points. The center point trajectory of the moire fringe signal Lissajous figure was calculated, and the amplitude values of the two moire fringe signals were determined according to characteristic points. The moire fringe signals according to the center point trajectory and signal amplitudes were then normalized. Error compensation of the dc level and amplitude of moire fringe signals was realized, so as to improve the dynamic subdivision accuracy of moire fringe signals when the code disk was stained. Experiments showed that, when the reading head was in the stained area of the code disk, the subdivision error of moire fringe signals was reduced from the peak value of 37.2 '' to 4.6 '', and the accuracy of the sensor can be improved using this algorithm for both different resolutions and different stains, which greatly improved the ability of the displacement sensor to adapt to a harsh environment.
引用
收藏
页码:2403 / 2410
页数:8
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