Optical Hydrogen Sensing Properties of e-Beam WO3 Films Decorated with Gold Nanoparticles

被引：5
作者：
Colusso, Elena [1 ,2 ]
Rigon, Michele [1 ,2 ]
Corso, Alain Jody [3 ]
Pelizzo, Maria Guglielmina [4 ]
Martucci, Alessandro [1 ,2 ,3 ]
机构：
[1] Univ Padua, Dept Ind Engn, Via Marzolo 9, I-35131 Padua, Italy
[2] INSTM, Via Marzolo 9, I-35131 Padua, Italy
[3] CNR, Ist Foton & Nanotecnol, Via Trasea 7, I-35131 Padua, Italy
[4] Univ Padua, Dept Informat Engn, Via Gradenigo 6, I-35131 Padua, Italy
来源：
SENSORS | 2023年 / 23卷 / 04期
关键词：
hydrogen sensing; tungsten oxide; e-beam deposition; gold nanoparticles; optical sensors; NANOSTRUCTURED TUNGSTEN-OXIDE; THIN-FILMS; AU; DEPOSITION; SENSORS;
D O I：
10.3390/s23041936
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
Tungsten oxide thin films with different thicknesses, crystallinity and morphology were synthesized by e-beam deposition followed by thermal treatment and acid boiling. The films with different surface morphologies were coated with gold nanoparticles and tested as optical sensing materials towards hydrogen. X-ray diffraction, scanning electron microscopy, ellipsometry and UV-VIS spectroscopy were employed to characterize the structural, morphological and optical properties of the film. We demonstrated a good response towards hydrogen in air, reaching a good selectivity among other common reducing gases, such as ammonia and carbon monoxide. The sensitivity has been proven to be highly dependent on the thickness and crystallinity of the samples.
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页数：11
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