SCALABLE MODULAR MEASUREMENT SYSTEM FOR CONTINUOUS BLOOD MONITORING WITH PIEZOELECTRIC MEMS RESONATORS

被引：0

作者：

Schneider, Michael ^{[1
]}

Koessl, Bernhard ^{[1
]}

Alasatri, Suresh ^{[1
]}

Magnet, Ingrid A. M. ^{[2
]}

Schmid, Ulrich ^{[1
]}

机构：

[1] TU Wien, Inst Sensor & Actuator Syst, Vienna, Austria

[2] Med Univ Vienna, Dept Emergency Med, Vienna, Austria

来源：

2023 IEEE 36TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS | 2023年

关键词：

Piezoelectric MEMS; resonator; blood; continuous monitoring;

D O I：

10.1109/MEMS49605.2023.10052396

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports on a novel scalable modular measurement system for continuous monitoring of the conductance spectrum of a piezoelectric MEMS resonator in blood either in standing or continuous flow conditions. Resonance frequency and quality factor of the resonator are extracted by automatic data fitting of the conductance spectrum. Both quantities can be monitored over extended periods of multiple hours and the sensor can be reused after cleaning. After careful sensor calibration, the dynamic viscosity can be extracted from the quality factor. This system allows for simultaneous dynamic viscosity measurements of multiple blood samples due to several modules arranged in parallel.

引用

页码：471 / 474

页数：4

共 12 条

[1] Biocompatible materials of pulsatile and rotary blood pumps: A brief review [J].

Ahmed, Azzam ;

Wang, Xianghui ;

Yang, Ming .

REVIEWS ON ADVANCED MATERIALS SCIENCE, 2020, 59 (01) :322-339

[2] Tailored wafer holder for a reliable deposition of sputtered aluminium nitride thin films at low temperatures [J].

Fischeneder, M. ;

Wistrela, E. ;

Bittner, A. ;

Schneider, M. ;

Schmid, U. .

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2017, 71 :283-289

[3] Piezoelectric-AlN resonators at two-dimensional flexural modes for the density and viscosity decoupled determination of liquids [J].

Huang, Linya ;

Li, Wei ;

Luo, Guoxi ;

Lu, Dejiang ;

Zhao, Libo ;

Yang, Ping ;

Wang, Xiaozhang ;

Wang, Jiuhong ;

Lin, Qijing ;

Jiang, Zhuangde .

MICROSYSTEMS & NANOENGINEERING, 2022, 8 (01)

[4] Haemolysis induced by mechanical circulatory support devices: unsolved problems [J].

Koehne, Inge .

PERFUSION-UK, 2020, 35 (06) :474-483

[5] Design-dependent performance of self-actuated and self-sensing piezoelectric-AlN cantilevers in liquid media oscillating in the fundamental in-plane bending mode [J].

Kucera, Martin ;

Wistrela, Elisabeth ;

Pfusterschmied, Georg ;

Ruiz-Diez, Victor ;

Manzaneque, Tomas ;

Hernando-Garcia, Jorge ;

Luis Sanchez-Rojas, Jose ;

Jachimowicz, Artur ;

Schalko, Johannes ;

Bittner, Achim ;

Schmid, Ulrich .

SENSORS AND ACTUATORS B-CHEMICAL, 2014, 200 :235-244

[6] Characterization of a roof tile-shaped out-of-plane vibrational mode in aluminum-nitride-actuated self-sensing micro-resonators for liquid monitoring purposes [J].

Kucera, Martin ;

Wistrela, Elisabeth ;

Pfusterschmied, Georg ;

Ruiz-Diez, Victor ;

Manzaneque, Tomas ;

Luis Sanchez-Rojas, Jose ;

Schalko, Johannes ;

Bittner, Achim ;

Schmid, Ulrich .

APPLIED PHYSICS LETTERS, 2014, 104 (23)

[7] Piezoelectric MEMS-evolution from sensing technology to diversified applications in the 5G/Internet of Things (IoT) era [J].

Le, Xianhao ;

Shi, Qiongfeng ;

Vachon, Philippe ;

Ng, Eldwin J. ;

Lee, Chengkuo .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2022, 32 (01)

[8] FREE VIBRATION OF RECTANGULAR-PLATES [J].

LEISSA, AW .

JOURNAL OF SOUND AND VIBRATION, 1973, 31 (03) :257-293

[9] Blood Rheology: Key Parameters, Impact on Blood Flow, Role in Sickle Cell Disease and Effects of Exercise [J].

Nader, Elie ;

Skinner, Sarah ;

Romana, Marc ;

Fort, Romain ;

Lemonne, Nathalie ;

Guillot, Nicolas ;

Gauthier, Alexandra ;

Antoine-Jonville, Sophie ;

Renoux, Celine ;

Hardy-Dessources, Marie-Dominique ;

Stauffer, Emeric ;

Joly, Philippe ;

Bertrand, Yves ;

Connes, Philippe .

FRONTIERS IN PHYSIOLOGY, 2019, 10

[10] Responsivity and sensitivity of piezoelectric MEMS resonators at higher order modes in liquids [J].

Pfusterschmied, Georg ;

Patocka, Florian ;

Weinmann, Christoph ;

Schneider, Michael ;

Platz, Daniel ;

Schmid, Ulrich .

SENSORS AND ACTUATORS A-PHYSICAL, 2019, 295 :84-92

← 1 2 →