An ultra-compact metasurface-based chromatic confocal sensor

被引：8

作者：

Chan, J. H. T. ^{[1
]}

Tang, D. ^{[1
]}

Williamson, J. ^{[1
]}

Martin, H. ^{[1
]}

Henning, A. J. ^{[1
]}

Jiang, X. ^{[1
]}

机构：

[1] Univ Huddersfield, Ctr Precis Technol, Huddersfield HD1 3DH, England

来源：

CIRP ANNALS-MANUFACTURING TECHNOLOGY | 2023年 / 72卷 / 01期

基金：

英国工程与自然科学研究理事会;

关键词：

Optical; Metrology; Metasurface;

D O I：

10.1016/j.cirp.2023.04.002

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Metasurfaces are planar optical elements that provide much greater freedom in manipulating light than conventional optics. This article explores the potential for miniaturised metasurface-based optical sensors. We consider the realisation of a chromatic confocal sensor for position measurement, where a conventional hyperchromatic lens is replaced by a metasurface. The design and fabrication process for a metasurface based on truncated-wave guide type meta-atoms is described. Experimental evaluation of the sensor performance confirms the potential for metasurface-based optical sensors to form the basis of a new generation of miniature, lightweight, low-cost optical sensors to support the data-driven manufacturing technologies of the future.& COPY; 2023 The Authors. Published by Elsevier Ltd on behalf of CIRP. This is an open access article under the CC BY license (http://creativecommons.org/licenses/by/4.0/)

引用

页码：465 / 468

页数：4

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