Studying the structural, optical, and electrical characteristics of Zn2SnO4 films using a direct current magnetron sputtering method

被引:2
作者
Pham, Minh Khang [1 ,2 ,3 ]
Dang, Phuc Huu [4 ]
Le, Thanh Duy [1 ,2 ]
Van Huynh, Tuan [1 ,2 ]
Le, Tran [1 ,2 ]
机构
[1] VNUHCM Univ Sci, Fac Phys & Engn Phys, Ho Chi Minh City 70000, Vietnam
[2] Vietnam Natl Univ Ho Chi Minh City, Ho Chi Minh City 70000, Vietnam
[3] Ho Chi Minh Univ Med & Pharm, Fac Basic Sci, Ho Chi Minh 70000, Vietnam
[4] Ind Univ Ho Chi Minh City, Ward 4, Fac Fundamental Sci, 12 Nguyen Van Bao, Ho Chi Minh City 70000, Vietnam
关键词
Zn2SnO4; film; Direct-current magnetron sputtering; The cubic inverse spinel structure; XPS spectra; EDX spectra; The photoelectronic effect; THIN-FILMS; ZINC STANNATE; TRANSPARENT; ZN;
D O I
10.1016/j.ceramint.2023.12.026
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
In this study, the characteristics of ZTO films are examined by varying the substrate temperature at an Ar ambient pressure of 3 x 10-3 Torr. The elemental content of Zn, Sn, and O in the generated Zn2SnO4 films was confirmed using X-ray dispersive and X-ray photoelectron spectroscopy. The result reveals that the Zn/Sn ratio for the film formed at 300 degrees C reaches 2. The (222) and (311) lattice planes validated the cubic inverse spinel structure of ZTO films in the X-ray diffraction investigation. Atomic force microscopy was used to measure surface roughness, and the RMS rose in a range of 1.34-4.79 nm as the substrate temperature increased. Fieldemission scanning electron microscopy revealed that the average crystal grain size grew in the region of 60-95 nm as the substrate temperature increased. The UV-vis absorption edge shift validates the Burstein-Moss shift rule, with a bandgap of ZTO-300 achieving the greatest value of 3.75 eV, corresponding to the largest carrier concentration. Electrical characteristics were investigated using Hall measurements. Film conductivity was primarily determined by the electron concentration or the presence of oxygen vacancies. The lowest resistivity measured was 5.4 x 10-3 omega cm, which corresponded to an electron concentration of 8.57 x 1019 cm -3. The current-voltage characteristics of the ZTO/p-Si junction proved its rectifiable quality. Because of the low resistivity of the ZTO-300 sample, the ZTO-300/p-Si heterojunction has the largest photocurrent (4.72 10-3 A), making it suitable for use in optoelectronic devices.
引用
收藏
页码:6824 / 6835
页数:12
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